EP 2875165 A1 20150527 - METHOD FOR PRODUCING PROTECTIVE LAYERS CONTAINING SILICIDES AND/OR OXIDIZED SILICIDES ON SUBSTRATES
Title (en)
METHOD FOR PRODUCING PROTECTIVE LAYERS CONTAINING SILICIDES AND/OR OXIDIZED SILICIDES ON SUBSTRATES
Title (de)
VERFAHREN ZUR HERSTELLUNG VON SCHUTZSCHICHTEN MIT SILICIDEN UND/ODER OXIDIERTEN!SILICIDEN AUF SUBSTRATEN
Title (fr)
PROCÉDÉ DE PRÉPARATION DE COUCHES PROTECTRICES AVEC DES SILICIURES ET/OU DES SILICIURES OXYDÉS SUR DES SUBSTRATS
Publication
Application
Priority
- DE 102012106518 A 20120718
- DE 2013100264 W 20130717
Abstract (en)
[origin: WO2014019571A1] The invention relates to a method for producing protective layers containing silicides and/or oxidized silicides on a substrate, in which silicide or a precursor thereof is applied to the substrate and the coated substrate is subjected to a temperature treatment above 250°C without further processing. The layers obtained have a thickness in the nano-range and can simultaneously have various characteristic features, i.e. they are multifunctional. The following characteristic features were found for these nano-layers: scratch resistance, abrasion resistance, corrosion resistance and temperature resistance up to 1500°C, depending in each case on the substrate and the silicide(oxide) used for the coating.
IPC 8 full level
C23C 14/06 (2006.01); C23C 14/58 (2006.01); C23C 16/42 (2006.01); C23C 16/56 (2006.01); C23C 30/00 (2006.01)
CPC (source: EP US)
B05D 1/04 (2013.01 - US); B05D 3/007 (2013.01 - US); C01B 21/068 (2013.01 - EP US); C01B 32/956 (2017.07 - EP US); C01B 33/06 (2013.01 - EP US); C23C 14/0682 (2013.01 - EP US); C23C 14/22 (2013.01 - US); C23C 14/34 (2013.01 - US); C23C 14/5806 (2013.01 - EP US); C23C 16/42 (2013.01 - EP US); C23C 16/44 (2013.01 - US); C23C 16/56 (2013.01 - EP US); C23C 30/00 (2013.01 - EP US); C25B 11/043 (2021.01 - EP US); C25B 11/051 (2021.01 - EP US); H01L 31/02167 (2013.01 - US); H01M 8/0271 (2013.01 - US); Y02E 60/50 (2013.01 - EP)
Citation (search report)
See references of WO 2014019571A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102012106518 A1 20140123; EP 2875165 A1 20150527; US 2015299844 A1 20151022; WO 2014019571 A1 20140206
DOCDB simple family (application)
DE 102012106518 A 20120718; DE 2013100264 W 20130717; EP 13759971 A 20130717; US 201314415144 A 20130717