EP 2887387 A1 20150624 - Semiconductor device and associated method
Title (en)
Semiconductor device and associated method
Title (de)
Halbleitervorrichtung und zugehöriges Verfahren
Title (fr)
Dispositif semi-conducteur et procédé associé
Publication
Application
Priority
EP 13199196 A 20131220
Abstract (en)
The invention relates to a semiconductor device and an associated method for fabricating the semiconductor device. The device comprises: a substrate having a contact surface and a back surface separated by a total distance; a vertical device formed in the substrate and having first and second terminals on the contact surface; an isolation trench extending the total distance through the substrate between the contact surface and the back surface to electrically isolate the vertical device; and a terminal separation trench extending from the contact surface into the substrate and arranged to separate and define an electrical conduction path between the first and second terminals of the vertical device.
IPC 8 full level
H01L 21/762 (2006.01); H01L 21/84 (2006.01); H01L 27/12 (2006.01); H01L 29/06 (2006.01); H01L 29/732 (2006.01); H01L 29/739 (2006.01); H01L 29/78 (2006.01)
CPC (source: EP US)
H01L 21/76224 (2013.01 - EP US); H01L 21/76283 (2013.01 - EP US); H01L 21/84 (2013.01 - EP US); H01L 27/1203 (2013.01 - EP US); H01L 29/0649 (2013.01 - US); H01L 29/0653 (2013.01 - EP US); H01L 29/7809 (2013.01 - EP US); H01L 29/7812 (2013.01 - EP US); H01L 29/7813 (2013.01 - EP US); H01L 2224/24137 (2013.01 - EP); H01L 2224/73267 (2013.01 - EP)
Citation (search report)
- [XY] JP 2000323654 A 20001124 - NISSAN MOTOR
- [XY] US 2003062622 A1 20030403 - PAVIER MARK [GB], et al
- [XY] US 5668397 A 19970916 - DAVIS CHRISTOPHER K [US], et al
- [XY] US 5930635 A 19990727 - BASHIR RASHID [US], et al
- [Y] WO 2011008893 A1 20110120 - IO SEMICONDUCTOR [US], et al
- [Y] US 7176707 B1 20070213 - HOKENSON GARY L [US]
- [Y] WO 2004053993 A1 20040624 - POWER ELECTRONICS DESIGN CT [GB], et al
- [Y] US 2006172494 A1 20060803 - KOHLMANN-VON PLATEN KLAUS [DE], et al
- [Y] US 2009085128 A1 20090402 - NAKAMURA YUKI [JP], et al
- [A] JP 2000332243 A 20001130 - NISSAN MOTOR
- [A] US 2008230810 A1 20080925 - YOSHIMURA MITSUHIRO [JP]
- [A] US 6075279 A 20000613 - ANDOH MAMORU [JP]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2887387 A1 20150624; CN 104733459 A 20150624; US 2015179735 A1 20150625
DOCDB simple family (application)
EP 13199196 A 20131220; CN 201410803328 A 20141219; US 201414575001 A 20141218