EP 2889481 A3 20151014 - Method for calibrating a membrane vacuum pump and membrane vacuum pump
Title (en)
Method for calibrating a membrane vacuum pump and membrane vacuum pump
Title (de)
Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe
Title (fr)
Procédé d'étalonnage d'une pompe sous vide à membrane et pompe sous vide à membrane
Publication
Application
Priority
DE 102013113351 A 20131203
Abstract (en)
[origin: JP2015117696A] PROBLEM TO BE SOLVED: To provide a method for calibrating a membrane sink pump capable of avoiding defects found in the prior art and a membrane vacuum pump.SOLUTION: This invention relates to a method for calibrating a membrane vacuum pump 1 for transmitting a medium, the pump has transmitting chambers 13, 14 that can be filled with a medium and has a piston 2 within an operating chamber that can be driven in a linear direction by a vibration coil driving part, the pump has membranes 3, 4 separating the transmitting chamber from an operating chamber 15 and arranged to vibrate between the transmitting chamber and the operating chamber, has a membrane head 5 forming the transmitting chambers together with the membranes, in this case, the piston enables the membranes to be moved and the piston is formed as one that can move in a prescribed stroke. The problem can be solved by the fact that there is provided a device 10 for detecting a position of the piston 2 and/or a dead center and that a control device 17 adjusts the dead center in response to a signal detected by the device 10.
IPC 8 full level
F04B 35/04 (2006.01); F04B 37/14 (2006.01); F04B 37/16 (2006.01); F04B 43/04 (2006.01); F04B 45/047 (2006.01); F04B 51/00 (2006.01)
CPC (source: EP US)
F04B 35/045 (2013.01 - EP); F04B 37/14 (2013.01 - EP); F04B 37/16 (2013.01 - EP); F04B 43/04 (2013.01 - EP US); F04B 45/047 (2013.01 - EP US); F04B 51/00 (2013.01 - EP US)
Citation (search report)
- [XA] DE 859477 C1
- [XA] US 2005047923 A1 20050303 - LI WENJUN [US], et al
- [A] WO 2008031418 A2 20080320 - THOMAS MAGNETE GMBH [DE], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2889481 A2 20150701; EP 2889481 A3 20151014; EP 2889481 B1 20180404; EP 2889481 B2 20221026; DE 102013113351 A1 20150603; DE 102013113351 A8 20240508; JP 2015117696 A 20150625; JP 6154797 B2 20170628
DOCDB simple family (application)
EP 14192137 A 20141106; DE 102013113351 A 20131203; JP 2014243343 A 20141201