EP 2897767 A4 20160727 - INCORPORATING ADDITIVES INTO FIXED ABRASIVE WEBS FOR IMPROVED CMP PERFORMANCE
Title (en)
INCORPORATING ADDITIVES INTO FIXED ABRASIVE WEBS FOR IMPROVED CMP PERFORMANCE
Title (de)
INTEGRATION VON ZUSÄTZEN IN FIXIERTE SCHLEIFBAHNEN FÜR VERBESSERTE CMP-LEISTUNG
Title (fr)
INCORPORATION D'ADDITIFS DANS DES BANDES ABRASIVES FIXES POUR DE MEILLEURES PERFORMANCES CMP
Publication
Application
Priority
- US 201261703815 P 20120921
- US 2013060022 W 20130917
Abstract (en)
[origin: WO2014047014A1] A structured abrasive article is provided that has a backing having first and second opposed major surfaces and a structured abrasive layer disposed on and secured to the first major surface of the backing. The structured abrasive layer includes a polymeric binder, abrasive particles dispersed in the binder and an additive dispersed in the binder. The additive provides improved chemical mechanical planarization (CMP) polish performance, including high oxide/nitride selectively, high removal rates, lower nitride loss and improved with-in- wafer non-uniformity (WIWNU).
IPC 8 full level
B24D 3/34 (2006.01); C09C 1/68 (2006.01); C09K 3/14 (2006.01)
CPC (source: CN EP US)
B24B 37/245 (2013.01 - CN EP US); B24D 3/344 (2013.01 - CN EP US); C09K 3/1436 (2013.01 - CN EP US); H01L 21/31053 (2013.01 - CN EP US)
Citation (search report)
- [Y] US 2009176443 A1 20090709 - KOLLODGE JEFFREY S [US], et al
- [Y] US 2012094487 A1 20120419 - KRANZ HEATHER K [US], et al
- See references of WO 2014047014A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2014047014 A1 20140327; CN 104822495 A 20150805; EP 2897767 A1 20150729; EP 2897767 A4 20160727; JP 2015532895 A 20151116; KR 20150058302 A 20150528; SG 11201502225X A 20150528; TW 201420706 A 20140601; US 2015217424 A1 20150806
DOCDB simple family (application)
US 2013060022 W 20130917; CN 201380049086 A 20130917; EP 13838975 A 20130917; JP 2015533125 A 20130917; KR 20157009287 A 20130917; SG 11201502225X A 20130917; TW 102133978 A 20130918; US 201314425697 A 20130917