EP 2898756 B1 20170104 - EUV RADIATION GENERATING DEVICE AND OPERATING METHOD THEREFOR
Title (en)
EUV RADIATION GENERATING DEVICE AND OPERATING METHOD THEREFOR
Title (de)
EUV-STRAHLUNGSERZEUGUNGSVORRICHTUNG UND BETRIEBSVERFAHREN DAFÜR
Title (fr)
DISPOSITIF DE GÉNÉRATION D'UN RAYONNEMENT EUV ET PROCÉDÉ PERMETTANT DE FAIRE FONCTIONNER LEDIT DISPOSITIF
Publication
Application
Priority
- DE 102012217120 A 20120924
- EP 2013002817 W 20130919
Abstract (en)
[origin: US2014084186A1] The invention relates to extreme ultraviolet “EUV” radiation generating systems that include a vacuum chamber where a target material can be positioned at a target position for generation of EUV radiation, and a beam guiding chamber for guiding a laser beam from a driver laser device towards the target position. The EUV radiation generating apparatus includes an intermediate chamber which is arranged between the vacuum chamber and the beam guiding chamber, a first window which seals the intermediate chamber in a gas-tight manner for entry of the laser beam from the beam guiding chamber and a second window which seals the intermediate chamber in a gas-tight manner for exit of the laser beam into the vacuum chamber. The invention also relates to a method for operating the EUV radiation generating apparatus.
IPC 8 full level
H05G 2/00 (2006.01)
CPC (source: EP US)
H05G 2/008 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
US 2014084186 A1 20140327; US 8847182 B2 20140930; CN 104756607 A 20150701; CN 104756607 B 20170222; DE 102012217120 A1 20140327; EP 2898756 A1 20150729; EP 2898756 B1 20170104; JP 2015530617 A 20151015; JP 6042550 B2 20161214; KR 101679525 B1 20161124; KR 20150060768 A 20150603; WO 2014044392 A1 20140327
DOCDB simple family (application)
US 201313834108 A 20130315; CN 201380055789 A 20130919; DE 102012217120 A 20120924; EP 13765953 A 20130919; EP 2013002817 W 20130919; JP 2015532331 A 20130919; KR 20157009566 A 20130919