EP 2918968 A3 20151223 - Optical shape measuring apparatus with diffraction grating and method of manufacturing article
Title (en)
Optical shape measuring apparatus with diffraction grating and method of manufacturing article
Title (de)
MESSVORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG EINES ARTIKELS
Title (fr)
APPAREIL DE MESURE ET PROCÉDÉ DE FABRICATION D'ARTICLE
Publication
Application
Priority
JP 2014050532 A 20140313
Abstract (en)
[origin: EP2918968A2] A measuring apparatus, for measuring a shape of an object to be measured, comprises an emitting unit (2) configured to emit pattern light, an optical system (3) configured to guide the pattern light emitted from the emitting unit to the object, a deflection unit (4) arranged between the optical system and the object and configured to deflect the pattern light emitted from the optical system, an image sensing unit (5) configured to capture the object via the optical system and the deflection unit, and a processing unit (7) configured to determine the shape of the object based on an image of the object captured by the image sensing unit, wherein the deflection unit comprises a diffraction grating configured to diffract the pattern light emitted from the optical system. In one embodiment the distance between the diffraction grating and the object is changed in order to vary the projected pattern. In another embodiment the diffraction grating is a polarizing diffraction grating and the emitting unit further comprises a polarization convertor, such that the projected pattern can be varied.
IPC 8 full level
G01B 11/25 (2006.01); G02B 5/30 (2006.01); G02B 26/08 (2006.01); G02B 27/09 (2006.01); G02B 27/28 (2006.01); G02B 27/42 (2006.01); G02F 1/13 (2006.01)
CPC (source: EP US)
G01B 11/2513 (2013.01 - EP US); G01B 11/2527 (2013.01 - EP US); G02B 5/3083 (2013.01 - US); G02B 26/0808 (2013.01 - EP US); G02B 27/0944 (2013.01 - US); G02B 27/1093 (2013.01 - EP US); G02B 27/28 (2013.01 - US); G02B 27/4205 (2013.01 - US); G02B 27/425 (2013.01 - EP US); G02B 27/4261 (2013.01 - EP US); G02F 1/1313 (2013.01 - US)
Citation (search report)
- [XYI] EP 1777490 A2 20070425 - GEN ELECTRIC [US]
- [Y] EP 1084430 A2 20010321 - METROLOGIC INSTR INC [US]
- [A] WO 2006107929 A1 20061012 - DIMENSIONAL PHOTONICS INTERNAT [US], et al
- [A] EP 0462595 A2 19911227 - FUJITSU LTD [JP]
- [L] JP 2015094756 A 20150518 - CANON KK
- [E] EP 2873946 A1 20150520 - CANON KK [JP]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2918968 A2 20150916; EP 2918968 A3 20151223; JP 2015175642 A 20151005; JP 6417099 B2 20181031; US 2015260510 A1 20150917; US 9797717 B2 20171024
DOCDB simple family (application)
EP 15000519 A 20150223; JP 2014050532 A 20140313; US 201514643170 A 20150310