EP 2946401 A2 20151125 - METHOD FOR PRODUCING A LEADFRAME ON A SUBSTRATE BY MEANS OF BLOCK COPOLYMERS
Title (en)
METHOD FOR PRODUCING A LEADFRAME ON A SUBSTRATE BY MEANS OF BLOCK COPOLYMERS
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES LEITERRAHMENS AUF EINEM SUBSTRAT MITTELS BLOCKCOPOLYMEREN
Title (fr)
PROCÉDÉ DE FABRICATION D'UN RÉSEAU DE CONDUCTEURS SUR UN SUBSTRAT AU MOYEN DE COPOLYMÈRES À BLOCS
Publication
Application
Priority
- FR 1300113 A 20130118
- FR 2014000010 W 20140117
Abstract (en)
[origin: WO2014111637A2] The method for producing patterns from a first material comprises the following steps: - providing a substrate (1) covered by a cover layer (2), - forming a first mask by means of a self-organised block copolymer structure, the first mask comprising first patterns, - depositing and irradiating a resin (9) to form an intermediate mask on the first mask, the intermediate mask covering a portion of the first patterns formed in the first mask and comprising second holes facing the first holes, - etching the cover layer (2) through the first and second facing holes so as to form third holes (12), - filling the third holes (12) with a first material to form the patterns from a first material.
IPC 8 full level
H01L 21/033 (2006.01); H01L 21/311 (2006.01)
CPC (source: EP US)
H01L 21/0337 (2013.01 - EP US); H01L 21/31144 (2013.01 - EP US); H01L 21/76816 (2013.01 - EP US)
Citation (search report)
See references of WO 2014111637A2
Citation (examination)
JP S56137627 A 19811027 - NIPPON ELECTRIC CO
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2014111637 A2 20140724; WO 2014111637 A3 20141113; EP 2946401 A2 20151125; FR 3001306 A1 20140725; US 2015340232 A1 20151126; US 9564328 B2 20170207
DOCDB simple family (application)
FR 2014000010 W 20140117; EP 14704379 A 20140117; FR 1300113 A 20130118; US 201414760382 A 20140117