EP 2950324 A1 20151202 - Charged particle optical apparatus having a selectively positionable differential pressure module
Title (en)
Charged particle optical apparatus having a selectively positionable differential pressure module
Title (de)
Optische Ladungsteilchenvorrichtung mit einem selektiv positionierbaren Differenzdruckmodul
Title (fr)
Appareil optique à particules chargées ayant un module de pression différentielle pouvant être positionné sélectivement
Publication
Application
Priority
EP 14001865 A 20140528
Abstract (en)
Disclosed is a charged particle optical apparatus, which includes a particle optical arrangement, configured to define a particle beam path for inspecting an object. The object is accommodated in a pressure-controlled interior of a specimen chamber during the inspection of the object. The charged particle optical apparatus further includes a differential pressure module having a differential pressure aperture. A positioning arm is arranged in the specimen chamber for selectively position the differential pressure module within the pressure-controlled interior of the specimen chamber into an operating position in which the particle beam path passes through the differential pressure aperture. The selective positioning includes an advancing movement of the differential pressure module toward the primary particle beam path. The advancing movement is transmitted to the differential pressure module by a track-guided movement of the positioning arm.
IPC 8 full level
H01J 37/18 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01)
CPC (source: EP US)
H01J 37/18 (2013.01 - EP US); H01J 37/244 (2013.01 - EP US); H01J 37/28 (2013.01 - EP US); H01J 2237/10 (2013.01 - EP US); H01J 2237/188 (2013.01 - EP US); H01J 2237/2605 (2013.01 - EP US)
Citation (search report)
- [XI] JP 2008010177 A 20080117 - HITACHI HIGH TECH CORP
- [XI] US 2011006209 A1 20110113 - YOSHIKAWA MITSUTOSHI [JP]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2950324 A1 20151202; EP 2950324 A8 20160113; EP 2950324 B1 20181121; US 2015348742 A1 20151203; US 9741528 B2 20170822
DOCDB simple family (application)
EP 14001865 A 20140528; US 201514724681 A 20150528