EP 2960519 A1 20151230 - SIEGBAHN STAGE
Title (en)
SIEGBAHN STAGE
Title (de)
SIEGBAHNSTUFE
Title (fr)
ÉTAGE DE SIEGBAHN
Publication
Application
Priority
DE 102014109004 A 20140626
Abstract (en)
[origin: JP2016008611A] PROBLEM TO BE SOLVED: To provide a simple Shiegbahn step that can be correspondingly manufactured in less-expensive manner in consideration of different vacuum technological requirements.SOLUTION: Siegbahn step 14 of a vacuum pump, in particular, a turbo molecular pump or a side-channel pump has a stator mechanism 16 and a rotor mechanism 18, each of them has one of two pump acting surfaces 20, 22 facing to each other, at least the pump acting surface of the stator mechanism has a structural surface 30. In this case, the pump acting surfaces facing to each other of the stator mechanism and the rotor mechanism are not flat.
Abstract (de)
Eine Siegbahnstufe einer Vakuumpumpe, insbesondere einer Turbomolekularpumpe oder einer Seitenkanalpumpe, umfasst ein Statororgan und ein Rotororgan, die jeweils eine von zwei einander gegenüberliegenden pumpaktiven Flächen aufweisen, wobei zumindest die pumpaktive Flächen des Statororgans eine strukturierte Oberfläche umfasst. Dabei sind die einander gegenüberliegenden pumpaktiven Flächen des Statororgans und des Rotororgans nicht planar.
IPC 8 full level
F04D 17/16 (2006.01); F04D 19/04 (2006.01); F04D 23/00 (2006.01)
CPC (source: EP)
F04D 17/168 (2013.01); F04D 19/042 (2013.01); F04D 23/008 (2013.01)
Citation (search report)
- [XI] US 2954157 A 19600927 - ECKBERG EDWIN E
- [X] EP 1170508 A1 20020109 - VARIAN INC [US]
- [XI] DE 605902 C 19341120 - HUGO SEEMANN DR
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2960519 A1 20151230; EP 2960519 B1 20191106; DE 102014109004 A1 20151231; JP 2016008611 A 20160118
DOCDB simple family (application)
EP 15174030 A 20150626; DE 102014109004 A 20140626; JP 2015126240 A 20150624