EP 2969373 A1 20160120 - LASER ABLATION PLATFORM FOR SOLAR CELLS
Title (en)
LASER ABLATION PLATFORM FOR SOLAR CELLS
Title (de)
LASERABLATIONSPLATTFORM FÜR SOLARZELLEN
Title (fr)
PLATE-FORME D'ABLATION PAR LASER POUR CELLULES SOLAIRES
Publication
Application
Priority
- US 201361780657 P 20130313
- US 2014014306 W 20140131
Abstract (en)
[origin: WO2014158346A1] Embodiments of the present invention relate to apparatus and methods for laser forming of holes in a substrate. In one embodiment, a laser scanning apparatus includes a movable transport assembly, and an optical device disposed adjacent the movable transport assembly, wherein the optical device comprises a polygonal mirror having a plurality of reflecting facets and an axis of rotation, an actuator configured to rotate the polygonal mirror relative to the axis of rotation, and a laser source positioned to direct electromagnetic radiation to at least one of the reflecting facets of the polygonal mirror, wherein the movable transport assembly is configured to position a substrate to receive the electromagnetic radiation reflected from the reflecting facets of the polygonal mirror.
IPC 8 full level
B23K 26/03 (2006.01); B23K 26/064 (2014.01); B23K 26/08 (2006.01); B23K 26/361 (2014.01)
CPC (source: CN EP)
B23K 26/0821 (2015.10 - EP); B23K 26/083 (2013.01 - CN EP); B23K 26/1224 (2015.10 - CN); B23K 26/382 (2015.10 - EP); B23K 26/40 (2013.01 - CN EP); H01L 31/022425 (2013.01 - CN EP); H01L 31/1876 (2013.01 - CN EP); B23K 2101/36 (2018.07 - CN); B23K 2103/50 (2018.07 - EP); Y02E 10/50 (2013.01 - EP); Y02P 70/50 (2015.11 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2014158346 A1 20141002; CN 105073333 A 20151118; CN 105073333 B 20171031; EP 2969373 A1 20160120; EP 2969373 A4 20161116; TW 201434569 A 20140916; TW I630970 B 20180801
DOCDB simple family (application)
US 2014014306 W 20140131; CN 201480008785 A 20140131; EP 14775131 A 20140131; TW 103104441 A 20140211