EP 2975412 B1 20170201 - MEMS ACCELEROMETER
Title (en)
MEMS ACCELEROMETER
Title (de)
MEMS-BESCHLEUNIGUNGSSENSOR
Title (fr)
ACCÉLÉROMÈTRE MEMS
Publication
Application
Priority
US 201414334599 A 20140717
Abstract (en)
[origin: EP2975412A1] A MEMS acceleration sensor comprising: a frame, a plurality of proofmasses; a plurality of flexures; a plurality of hinges and a plurality of gauges. The frame, proofmasses, flexures, hinges and gauges designed to measure acceleration in a direction perpendicular to the device plane while being generally resistant to motions parallel to the device plane. The measurement of the acceleration is accomplished through the piezoresistive effect of the strain in the gauges.
IPC 8 full level
G01P 15/12 (2006.01); G01P 15/08 (2006.01)
CPC (source: EP US)
B81B 3/0035 (2013.01 - US); G01P 15/09 (2013.01 - US); G01P 15/123 (2013.01 - EP US); B81B 2203/0338 (2013.01 - US); G01P 15/0802 (2013.01 - US); G01P 15/18 (2013.01 - US); G01P 2015/0837 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2975412 A1 20160120; EP 2975412 B1 20170201; US 2016018435 A1 20160121; US 9625486 B2 20170418
DOCDB simple family (application)
EP 15170390 A 20150603; US 201414334599 A 20140717