EP 2979296 A1 20160203 - PROCESS FOR MANUFACTURING A COMPOSITE STRUCTURE AND CORRESPONDING STRUCTURE
Title (en)
PROCESS FOR MANUFACTURING A COMPOSITE STRUCTURE AND CORRESPONDING STRUCTURE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER VERBUNDSTRUKTUR UND ENTSPRECHENDE STRUKTUR
Title (fr)
PROCEDE DE FABRICATION D'UNE STRUCTURE COMPOSITE ET STRUCTURE CORRESPONDANTE
Publication
Application
Priority
- FR 1300738 A 20130329
- FR 2014050666 W 20140321
Abstract (en)
[origin: WO2014154978A1] The invention relates to a process for manufacturing a composite structure, said process comprising the following steps: a) providing a donor substrate (50) and a carrier substrate (10); b) forming a dielectric layer (30); c) forming a covering layer (20); d) forming a weakened zone (60) in the donor substrate (50); e) joining the carrier substrate (10) and the donor substrate (50) via a contact surface (70) having an outline (Cs); f) fracturing the donor substrate (50) via the weakened zone (60), steps b) and e) being executed so that the outline (Cz) is inscribed in the outline (Cs), and step c) being executed so that the covering layer (20) covers the peripheral surface of the dielectric layer (30).
IPC 8 full level
H01L 21/762 (2006.01); H01L 21/02 (2006.01); H01L 27/12 (2006.01); H01L 29/06 (2006.01)
CPC (source: EP RU US)
H01L 21/02164 (2013.01 - US); H01L 21/0217 (2013.01 - US); H01L 21/62 (2013.01 - RU); H01L 21/76254 (2013.01 - EP US); H01L 27/12 (2013.01 - US); H01L 29/0649 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2014154978 A1 20141002; CN 105074895 A 20151118; EP 2979296 A1 20160203; FR 3003997 A1 20141003; FR 3003997 B1 20150320; JP 2016519431 A 20160630; JP 6306684 B2 20180404; KR 20150140313 A 20151215; RU 2015141124 A 20170504; RU 2645895 C2 20180228; SG 11201507963Q A 20151029; US 2016042989 A1 20160211; US 9799549 B2 20171024
DOCDB simple family (application)
FR 2014050666 W 20140321; CN 201480018752 A 20140321; EP 14718659 A 20140321; FR 1300738 A 20130329; JP 2016504722 A 20140321; KR 20157030956 A 20140321; RU 2015141124 A 20140321; SG 11201507963Q A 20140321; US 201414780467 A 20140321