Global Patent Index - EP 2988118 A1

EP 2988118 A1 20160224 - Neutral atom or molecule detector

Title (en)

Neutral atom or molecule detector

Title (de)

Detektor von neutralem Atom oder Molekül

Title (fr)

Détecteur d'atome ou de molécule neutre

Publication

EP 2988118 A1 20160224 (EN)

Application

EP 14181922 A 20140822

Priority

EP 14181922 A 20140822

Abstract (en)

A probe (28) for detecting neutral particles, such as neutral helium atoms or deuterium molecules, originating from a beam (16) of neutral particles directed at a target location (21) of a sample (22) and subsequently scattered at the target location (21) is disclosed. The probe (28) has a direction filter (32) that is adapted to allow passage through the direction filter (28) for particles travelling in a direction from the target location (21) to a filter area (46) of the direction filter (32). The direction filter (28) acts as a collimator comprising an array of elongated microchannels (58) intersecting at the target location (21). The probe (28) further has an neutral particle detector (40) that detects the particles that has passed through the direction filter (32). The probe (28) can be integrated in a scanning neutral helium microscope (10).

IPC 8 full level

G01N 23/22 (2006.01); G21K 1/02 (2006.01)

CPC (source: EP US)

G01N 23/22 (2013.01 - EP US); G21K 1/025 (2013.01 - EP); H01J 49/288 (2013.01 - EP)

Citation (applicant)

JOURNAL OF MICROSCOPY, vol. 229, 2008, pages 1 - 5

Citation (search report)

  • [Y] US 2013001413 A1 20130103 - WITHAM PHILIP JAMES [US]
  • [Y] US 4672204 A 19870609 - SLODZIAN GEORGES [FR], et al
  • [Y] MATTIOLI F ET AL: "A nanotechnology application for low energy neutral atom detection with high angular resolution for the BepiColombo mission to Mercury", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 88, no. 8, 16 February 2011 (2011-02-16), pages 2330 - 2333, XP028098121, ISSN: 0167-9317, [retrieved on 20110220], DOI: 10.1016/J.MEE.2011.02.092
  • [Y] PEDEMONTE L ET AL: "High-resolution scattering apparatus for surface studies", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 73, no. 12, 1 December 2002 (2002-12-01), pages 4257 - 4263, XP012039517, ISSN: 0034-6748, DOI: 10.1063/1.1517147

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

EP 2988118 A1 20160224; EP 3183562 A1 20170628; EP 3183562 B1 20211020; WO 2016026963 A1 20160225

DOCDB simple family (application)

EP 14181922 A 20140822; EP 15754196 A 20150821; EP 2015069259 W 20150821