EP 2994762 A1 20160316 - ELECTRICAL CONTACTING DEVICE
Title (en)
ELECTRICAL CONTACTING DEVICE
Title (de)
ELEKTRISCHE KONTAKTIERVORRICHTUNG
Title (fr)
DISPOSITIF DE MISE EN CONTACT ÉLECTRIQUE
Publication
Application
Priority
- DE 102013008324 A 20130508
- EP 2014055890 W 20140325
Abstract (en)
[origin: WO2014180596A1] The invention relates to an electrical contacting device (1) for electrical physical contact with a specimen (5), particularly a wafer, taking place in a contacting direction (15), said electrical contacting device having at least one conductor substrate (2) which can be electrically connected to a testing device, at least one contact distance transformer (4) and at least one contact head (3) having electrical contact elements (9) and used particularly for compensating different physical contact distances in the contacting direction (19) existing among the contact elements (9). According to the invention, the contact head (3) is arranged between the conductor substrate (2) and the contact distance transformer (4).
IPC 8 full level
G01R 1/073 (2006.01); G01R 31/28 (2006.01); H01R 12/71 (2011.01); H01R 12/85 (2011.01)
CPC (source: EP US)
G01R 1/07357 (2013.01 - EP US); G01R 31/2889 (2013.01 - EP US); H01R 12/714 (2013.01 - EP US); H01R 12/91 (2013.01 - EP US)
Citation (search report)
See references of WO 2014180596A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102013008324 A1 20141113; CN 105308465 A 20160203; EP 2994762 A1 20160316; JP 2016522404 A 20160728; JP 6132977 B2 20170524; US 2016109483 A1 20160421; US 9863978 B2 20180109; WO 2014180596 A1 20141113
DOCDB simple family (application)
DE 102013008324 A 20130508; CN 201480026135 A 20140325; EP 14715230 A 20140325; EP 2014055890 W 20140325; JP 2016512255 A 20140325; US 201414786770 A 20140325