EP 3008385 B1 20180314 - PROCESS GAS ABATEMENT
Title (en)
PROCESS GAS ABATEMENT
Title (de)
PROZESSGASREDUZIERUNG
Title (fr)
ÉPURATION DE GAZ DE PROCÉDÉ
Publication
Application
Priority
- GB 201310252 A 20130610
- GB 2014051631 W 20140529
Abstract (en)
[origin: GB2515017A] A process gas abatement apparatus and method are disclosed. The process gas abatement apparatus comprises a burner having a combustion chamber operable to receive an effluent gas stream from a manufacturing process tool to be treated within the combustion chamber at a sub-atmospheric pressure. The combustion chamber is operable to receive a fuel, oxidant and diluents. The fuel, oxidant and diluent are used to control combustion within the combustion chamber to treat the effluent gas stream to produce a treated exhaust stream. The diluent is condensable in the treated exhaust stream so that it changes state. By providing a diluent in the form of an inert condensable the volume gain within the combustion chamber is reduced and a lower volume of gas need be brought up to atmospheric pressure by a discharge pump.
IPC 8 full level
CPC (source: EP GB US)
F23G 7/06 (2013.01 - GB); F23G 7/065 (2013.01 - EP GB US); F23L 7/00 (2013.01 - EP US); F23L 2900/07002 (2013.01 - EP US)
Citation (examination)
US 4886444 A 19891212 - HIRASE IKUO [JP], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
GB 201310252 D0 20130724; GB 2515017 A 20141217; GB 2515017 B 20170920; CN 105556211 A 20160504; CN 105556211 B 20171024; EP 3008385 A1 20160420; EP 3008385 B1 20180314; JP 2016526648 A 20160905; JP 6422953 B2 20181114; KR 102315105 B1 20211019; KR 20160019428 A 20160219; TW 201509509 A 20150316; TW I633926 B 20180901; US 2016230989 A1 20160811; WO 2014199123 A1 20141218
DOCDB simple family (application)
GB 201310252 A 20130610; CN 201480033061 A 20140529; EP 14728250 A 20140529; GB 2014051631 W 20140529; JP 2016518580 A 20140529; KR 20157034852 A 20140529; TW 103119944 A 20140609; US 201414961916 A 20140529