EP 3014219 B1 20171011 - DISPLACEMENT DEVICES AND METHODS AND APPARATUS FOR DETECTING AND ESTIMATING MOTION ASSOCIATED WITH SAME
Title (en)
DISPLACEMENT DEVICES AND METHODS AND APPARATUS FOR DETECTING AND ESTIMATING MOTION ASSOCIATED WITH SAME
Title (de)
VERSCHIEBUNGSVORRICHTUNGEN UND VERFAHREN SOWIE VORRICHTUNG ZUR ERKENNUNG UND SCHÄTZUNG VON DAMIT ZUSAMMENHÄNGENDER BEWEGUNG
Title (fr)
DISPOSITIFS ET PROCÉDÉS DE DÉPLACEMENT ET APPAREIL POUR DÉTECTER ET ESTIMER UN MOUVEMENT ASSOCIÉ
Publication
Application
Priority
- US 201361862520 P 20130806
- US 201462008519 P 20140606
- CA 2014050739 W 20140806
Abstract (en)
[origin: WO2015017933A1] Apparatus and method estimate a position of a movable stage. The apparatus comprises: a stator comprising 2D array of sensors arranged relative to one another to provide a plurality of stator-Y oriented sensor columns and a plurality of stator-X oriented sensor rows; a movable stage comprising a first Y-magnet array comprising a plurality of first magnetization segments generally linearly elongated in a stage-Y direction, each first magnetization segment having a stage-Y direction length, Lyy, and a magnetization direction generally orthogonal to the stage-Y direction, the magnetization directions of the plurality of first magnetization segments exhibiting a first magnetic spatial period λχ over a stage-X direction width, Wyx, of the first magnet array; and a controller connected to receive information based on an output from each of the sensors and configured to use the information to determine a stator-X direction position of the movable stage.
IPC 8 full level
G01D 5/14 (2006.01); H01L 21/68 (2006.01)
CPC (source: EP US)
G01D 5/145 (2013.01 - EP US); H01L 21/67259 (2013.01 - US); G01D 2205/90 (2021.05 - EP); H01L 21/68 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2015017933 A1 20150212; CN 105452812 A 20160330; CN 105452812 B 20190430; EP 3014219 A1 20160504; EP 3014219 A4 20170315; EP 3014219 B1 20171011; JP 2016527518 A 20160908; JP 6373992 B2 20180815; US 10222237 B2 20190305; US 10704927 B2 20200707; US 11397097 B2 20220726; US 2016161288 A1 20160609; US 2018094949 A1 20180405; US 2020370925 A1 20201126
DOCDB simple family (application)
CA 2014050739 W 20140806; CN 201480045532 A 20140806; EP 14833852 A 20140806; JP 2016532170 A 20140806; US 201615016027 A 20160204; US 201715791345 A 20171023; US 202016888599 A 20200529