EP 3014287 A1 20160504 - TESTING DEVICE FOR ELECTRICALLY TESTING AN ELECTRICAL TEST SPECIMEN
Title (en)
TESTING DEVICE FOR ELECTRICALLY TESTING AN ELECTRICAL TEST SPECIMEN
Title (de)
PRÜFVORRICHTUNG ZUR ELEKTRISCHEN PRÜFUNG EINES ELEKTRISCHEN PRÜFLINGS
Title (fr)
DISPOSITIF D'ESSAI PERMETTANT L'ESSAI ÉLECTRIQUE D'UN ÉCHANTILLON ÉLECTRIQUE
Publication
Application
Priority
- DE 102013010934 A 20130629
- EP 2014057671 W 20140415
Abstract (en)
[origin: WO2014206594A1] The invention relates to a testing device (1) for electrically testing an electrical test specimen (2), in particular a wafer, said testing device having a test head (4) in which at least one testing contact (5) is mounted for electrically contacting the test specimen (2). At least one outlet opening (13) for discharging a gas, in particular a protective gas, is provided in a wall (15) of the test head (4) in a contact region (14).
IPC 8 full level
G01R 1/04 (2006.01); G01R 31/28 (2006.01)
CPC (source: EP US)
G01R 1/0491 (2013.01 - EP US); G01R 1/0675 (2013.01 - US); G01R 1/07314 (2013.01 - EP); G01R 31/2877 (2013.01 - EP); G01R 31/2884 (2013.01 - US); G01R 31/2891 (2013.01 - US); G01R 1/07357 (2013.01 - EP); G01R 31/2886 (2013.01 - EP US)
Citation (search report)
See references of WO 2014206594A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2014206594 A1 20141231; CN 105393124 A 20160309; DE 102013010934 A1 20150115; EP 3014287 A1 20160504; JP 2016528487 A 20160915; US 2016370423 A1 20161222
DOCDB simple family (application)
EP 2014057671 W 20140415; CN 201480037327 A 20140415; DE 102013010934 A 20130629; EP 14725018 A 20140415; JP 2016522343 A 20140415; US 201414901466 A 20140415