EP 3016483 B1 20190501 - METHOD AND APPARATUS FOR GENERATING A COLD PLASMA WITH FIRST AND SECOND CHAMBER
Title (en)
METHOD AND APPARATUS FOR GENERATING A COLD PLASMA WITH FIRST AND SECOND CHAMBER
Title (de)
VERFAHREN UND VORRICHTUNG ZUM ERZEUGEN EINES KALTEN PLASMAS MIT EINER ERSTEN UND EINER ZWEITEN KAMMER
Title (fr)
PROCÉDÉ ET DISPOSITIF DE GÉNÉRATION D'UN PLASMA FROID À L'AIDE D'UNE PREMIÈRE ET D'UNE SECONDE CHAMBRE
Publication
Application
Priority
DE 102014222238 A 20141030
IPC 8 full level
H05H 1/24 (2006.01); C23C 16/513 (2006.01); H05H 1/42 (2006.01)
CPC (source: EP US)
H05H 1/2406 (2013.01 - US); H05H 1/471 (2021.05 - EP); H05H 2240/20 (2013.01 - EP); H05H 2245/15 (2021.05 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3016483 A1 20160504; EP 3016483 B1 20190501; DE 102014222238 A1 20160504
DOCDB simple family (application)
EP 15191972 A 20151028; DE 102014222238 A 20141030