EP 3016486 B1 20170816 - Desmear module of a horizontal process line and a method for separation and removal of desmear particles from such a desmear module
Title (en)
Desmear module of a horizontal process line and a method for separation and removal of desmear particles from such a desmear module
Title (de)
Entschmierungsmodul einer horizontalen Verfahrenslinie und Verfahren zur Abtrennung und Entfernung von Entschmierungsteilchen aus solch einem Entschmierungsmodul
Title (fr)
Module de décapage des impuretés d'une ligne de production horizontale et procédé de séparation et d'élimination des impuretés à partir d'un tel module de décapage
Publication
Application
Priority
EP 14190815 A 20141029
Abstract (en)
[origin: EP3016486A1] The present invention is related to a desmear module 1 for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated for a removal of precipitates comprising a desmear container 2 being connectable to a desmear unit 3, a pump 4 and at least a first liquid connection element 5 for connecting said pump with the desmear unit, wherein said pump is in conjunction with said desmear unit by said at least first liquid connection element; and wherein a treatment liquid level 6 is provided inside of the desmear module, which is above of an intake area 7 of the pump; wherein the desmear module further comprises at least a first liquid area 9, at least an adjacent second liquid area 10 comprising the intake area of the pump, and at least a first separating element 11 arranged between said at least first liquid area and said at least second liquid area. The present invention is further related to a method for selective separation and subsequent removal of desmear particles from such a desmear module.
IPC 8 full level
H05K 3/00 (2006.01)
CPC (source: CN EP KR US)
H05K 3/0055 (2013.01 - CN EP KR US); H05K 3/0088 (2013.01 - EP KR US); B81C 1/00539 (2013.01 - US); H05K 3/00 (2013.01 - US); H05K 3/0088 (2013.01 - CN); H05K 2203/0796 (2013.01 - CN EP KR US); H05K 2203/1545 (2013.01 - CN EP KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3016486 A1 20160504; EP 3016486 B1 20170816; CN 107113973 A 20170829; CN 107113973 B 20190517; JP 2017535954 A 20171130; JP 6426285 B2 20181121; KR 101975128 B1 20190503; KR 20170078657 A 20170707; TW 201630490 A 20160816; TW I662871 B 20190611; US 2017231097 A1 20170810; US 9930786 B2 20180327; WO 2016066431 A1 20160506
DOCDB simple family (application)
EP 14190815 A 20141029; CN 201580059016 A 20151015; EP 2015073833 W 20151015; JP 2017523250 A 20151015; KR 20177011761 A 20151015; TW 104135469 A 20151028; US 201515515357 A 20151015