EP 3019915 A1 20160518 - METHOD FOR THE PERPENDICULAR ORIENTATION OF NANODOMAINS OF BLOCK COPOLYMERS, USING STATISTICAL OR GRADIENT COPOLYMERS, THE MONOMERS OF WHICH DIFFER AT LEAST IN PART FROM THOSE PRESENT IN EACH OF THE BLOCKS OF THE BLOCK COPOLYMER
Title (en)
METHOD FOR THE PERPENDICULAR ORIENTATION OF NANODOMAINS OF BLOCK COPOLYMERS, USING STATISTICAL OR GRADIENT COPOLYMERS, THE MONOMERS OF WHICH DIFFER AT LEAST IN PART FROM THOSE PRESENT IN EACH OF THE BLOCKS OF THE BLOCK COPOLYMER
Title (de)
VERFAHREN ZUR SENKRECHTEN AUSRICHTUNG VON NANODOMÄNEN VON BLOCKCOPOLYMEREN MITTELS STATISTISCHER ODER GRADIENTENCOPOLYMERE, DEREN MONOMERE SICH ZUMINDEST TEILWEISE VON JENEN IN JEDEM DER BLÖCKE DES BLOCKCOPOLYMER VORHANDENEN UNTERSCHEIDEN
Title (fr)
PROCEDE D'ORIENTATION PERPENDICULAIRE DE NANODOMAINES DE COPOLYMERES A BLOCS PAR L'UTILISATION DE COPOLYMERES STATISTIQUES OU A GRADIENT DONT LES MONOMERES SONT AU MOINS EN PARTIE DIFFERENTS DE CEUX PRESENTS RESPECTIVEMENT DANS CHACUN DES BLOCS DU COPOLYMERE A BLOCS
Publication
Application
Priority
- FR 1356831 A 20130711
- FR 2014051771 W 20140710
Abstract (en)
[origin: WO2015004392A1] A method for the perpendicular orientation of nanodomains of block copolymers, using statistical or gradient copolymers the monomers of which differ at least in part from the monomers present in each of the blocks of the block copolymer. The present invention relates to a method for the perpendicular orientation of nanodomains of block copolymers on a substrate, using an underlayer of statistical or gradient copolymers, the monomers of which differ at least in part from those present in each of the blocks of the block copolymers.
IPC 8 full level
G03F 7/00 (2006.01)
CPC (source: EP US)
C09D 153/00 (2013.01 - EP US); G03F 7/0002 (2013.01 - EP US); B82Y 40/00 (2013.01 - EP US)
Citation (search report)
See references of WO 2015004392A1
Citation (examination)
- US 2011147984 A1 20110623 - CHENG JOY [US], et al
- P.MANSKI ET AL: "Controlling Polymer-Surface Interactions with Random Copolymer Brushes", SCIENCE, vol. 275, no. 5305, 7 March 1997 (1997-03-07), pages 1458 - 1460, XP055017500, DOI: 10.1126/science.275.5305.1458
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2015004392 A1 20150115; CN 105492971 A 20160413; CN 105492971 B 20190910; EP 3019915 A1 20160518; FR 3008413 A1 20150116; FR 3008413 B1 20150807; JP 2016525592 A 20160825; JP 6143955 B2 20170607; KR 101779729 B1 20170918; KR 20160040579 A 20160414; SG 11201600135P A 20160226; US 2016154302 A1 20160602
DOCDB simple family (application)
FR 2014051771 W 20140710; CN 201480047816 A 20140710; EP 14747091 A 20140710; FR 1356831 A 20130711; JP 2016524877 A 20140710; KR 20167003522 A 20140710; SG 11201600135P A 20140710; US 201414904325 A 20140710