EP 3031577 A4 20170322 - POLISHING TOOL AND PROCESSING METHOD FOR MEMBER
Title (en)
POLISHING TOOL AND PROCESSING METHOD FOR MEMBER
Title (de)
POLIERWERKZEUG UND VERARBEITUNGSVERFAHREN FÜR EIN ELEMENT
Title (fr)
OUTIL DE POLISSAGE ET PROCÉDÉ DE TRAITEMENT POUR ÉLÉMENT
Publication
Application
Priority
- JP 2013167116 A 20130809
- JP 2014070712 W 20140806
Abstract (en)
[origin: EP3031577A1] The present invention relates to a method for polishing an object having a certain shape and, more particularly, to a polishing method using a polishing tool provided with a polishing pad including a polishing surface shaped in conformance with a curved surface of an object to be polished to efficiently and uniformly polish the curved surface of the object. A polishing tool of the present invention is provided with a polishing pad including a polishing surface shaped in conformance with a curved surface of an object to be polished to uniformly contact the curved surface of the object. The polishing pad preferably has a Shore A hardness of 5 or greater and a surface formed by at least one of a cloth, a non-woven fabric, a resin processed non-woven fabric, synthetic leather, synthetic resin foam, and a composite thereof. A polishing method of the present invention uses a polishing tool including a polishing surface shaped in conformance with a curved surface of an object to be polished to uniformly contact the curved surface of the object and polish the curved surface of the object.
IPC 8 full level
B24B 9/00 (2006.01); B24B 37/11 (2012.01); B24D 13/12 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP US)
B24B 9/065 (2013.01 - EP US); B24B 37/11 (2013.01 - EP US); B24B 37/20 (2013.01 - EP US)
Citation (search report)
- [XI] US 2012315739 A1 20121213 - HASHII TOMOHIRO [JP], et al
- [XA] EP 0734811 A2 19961002 - SHINETSU HANDOTAI KK [JP], et al
- [X] EP 0958889 A2 19991124 - TOKYO SEIMITSU CO LTD [JP]
- [A] US 2001014570 A1 20010816 - WENSKI GUIDO [DE], et al
- See references of WO 2015020082A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3031577 A1 20160615; EP 3031577 A4 20170322; CN 105451938 A 20160330; JP WO2015020082 A1 20170302; KR 20160041908 A 20160418; TW 201527048 A 20150716; US 2016167192 A1 20160616; WO 2015020082 A1 20150212
DOCDB simple family (application)
EP 14834968 A 20140806; CN 201480044902 A 20140806; JP 2014070712 W 20140806; JP 2015530920 A 20140806; KR 20167002949 A 20140806; TW 103127111 A 20140807; US 201414910059 A 20140806