EP 3034882 A3 20161026 - VACUUM PUMP
Title (en)
VACUUM PUMP
Title (de)
VAKUUMPUMPE
Title (fr)
POMPE À VIDE
Publication
Application
Priority
DE 102014118881 A 20141217
Abstract (en)
[origin: JP2016114061A] PROBLEM TO BE SOLVED: To provide a vacuum pump capable of providing at least one of advantages of overcoming low pump housing temperature and high gas load during an operation of the vacuum pump, being usable under high ambient temperature, and having low consumption of electric output.SOLUTION: In a vacuum pump having at least one pump mechanism for pumping a gas along a pump channel 10 from an inlet 70 to an outlet of the vacuum pump, in particular, a turbo molecular pump, the pump channel is shifted through at least one first clearance 83a, 83b, 83c, and in the clearance, a pumping function is exerted during the operation of the vacuum pump. At least one second clearance 85a is disposed, and in the clearance, the pumping function is not exerted during the operation of the vacuum pump, and preferably the pump channel is shifted through the second clearance. The second clearance is larger than the first clearance for at least a certain factor.SELECTED DRAWING: Figure 1
IPC 8 full level
F04D 19/04 (2006.01); F04D 25/06 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 19/044 (2013.01); F04D 25/0606 (2013.01)
Citation (search report)
- [XYI] EP 2631488 A2 20130828 - PFEIFFER VACUUM GMBH [DE]
- [XYI] DE 202013002969 U1 20140630 - OERLIKON LEYBOLD VACUUM GMBH [DE]
- [XAY] US 2001041134 A1 20011115 - IWANE MATSUMI [JP], et al
- [XA] DE 3627642 A1 19870226 - RIKAGAKU KENKYUSHO [JP], et al
- [YA] WO 2006111159 A1 20061026 - TEMIC AUTO ELECTR MOTORS GMBH [DE], et al
- [YA] DE 10020946 A1 20011115 - SIEMENS AG [DE]
- [YA] DE 102011114280 A1 20130328 - DAIMLER AG [DE]
- [XP] EP 2829734 A1 20150128 - PFEIFFER VACUUM GMBH [DE]
- [E] EP 2995820 A1 20160316 - PFEIFFER VACUUM GMBH [DE]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3034882 A2 20160622; EP 3034882 A3 20161026; DE 102014118881 A1 20160623; JP 2016114061 A 20160623
DOCDB simple family (application)
EP 15195879 A 20151123; DE 102014118881 A 20141217; JP 2015245410 A 20151216