EP 3037573 A4 20170419 - PLATING APPARATUS AND SENSING DEVICE USING SAME
Title (en)
PLATING APPARATUS AND SENSING DEVICE USING SAME
Title (de)
PLATTIERUNGSVORRICHTUNG UND ERFASSUNGSVORRICHTUNG DAMIT
Title (fr)
APPAREIL DE PLACAGE ET DISPOSITIF DE DÉTECTION L'UTILISANT
Publication
Application
Priority
- JP 2013169504 A 20130819
- JP 2014070252 W 20140731
Abstract (en)
[origin: EP3037573A1] A plating apparatus (1) includes: a holding member (2) that holds a plated object (W); a spacer (4) that is stacked on the holding member (2) via a first seal member (3) in an annular shape surrounding the plated object (W), and has a through portion (45) from which the plated object (W) is exposed and which stores a plating solution; and an anode member (6) that is stacked on the spacer (4) via a second seal member (3) in an annular shape surrounding the through portion (45), and has an anode layer (62) arranged to face the plated object (W) which is exposed from the through portion (45).
IPC 8 full level
C23C 18/16 (2006.01); C25D 17/00 (2006.01); C25D 17/06 (2006.01); C25D 17/08 (2006.01); C25D 17/12 (2006.01); C25D 21/12 (2006.01); G01N 27/42 (2006.01)
CPC (source: EP KR US)
C23C 18/1619 (2013.01 - US); C23C 18/163 (2013.01 - EP KR US); C23C 18/1683 (2013.01 - EP KR US); C25D 17/00 (2013.01 - KR); C25D 17/001 (2013.01 - EP KR US); C25D 17/002 (2013.01 - EP US); C25D 17/004 (2013.01 - EP KR US); C25D 17/008 (2013.01 - EP US); C25D 17/06 (2013.01 - EP KR US); C25D 17/10 (2013.01 - KR US); C25D 17/12 (2013.01 - EP US); C25D 21/12 (2013.01 - EP KR US)
Citation (search report)
- [XAI] WO 2012079101 A1 20120621 - HACKSTEINER MARKUS [AT]
- [A] US 2006049038 A1 20060309 - GRIEGO THOMAS P [US], et al
- See references of WO 2015025693A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3037573 A1 20160629; EP 3037573 A4 20170419; EP 3037573 B1 20180314; CN 105473770 A 20160406; CN 105473770 B 20170908; JP 2015038232 A 20150226; JP 6226229 B2 20171108; KR 101773308 B1 20170830; KR 20160045758 A 20160427; SG 11201601245V A 20160330; US 2016230285 A1 20160811; WO 2015025693 A1 20150226
DOCDB simple family (application)
EP 14837234 A 20140731; CN 201480045566 A 20140731; JP 2013169504 A 20130819; JP 2014070252 W 20140731; KR 20167006661 A 20140731; SG 11201601245V A 20140731; US 201414912698 A 20140731