EP 3042551 B1 20170823 - BEAM GUIDING APPARATUS AND EUV RADIATION GENERATING EQUIPMENT INCORPORATING SAME
Title (en)
BEAM GUIDING APPARATUS AND EUV RADIATION GENERATING EQUIPMENT INCORPORATING SAME
Title (de)
STRAHLFÜHRUNGSEINRICHTUNG UND EUV-STRAHLUNGSERZEUGUNGSVORRICHTUNG DAMIT
Title (fr)
SYSTÈME DE GUIDAGE DE FAISCEAU ET DISPOSITIF GÉNÉRATEUR DE RAYONNEMENT EUV ÉQUIPÉ DE CE SYSTÈME
Publication
Application
Priority
EP 2013068105 W 20130902
Abstract (en)
[origin: WO2015028103A1] The invention relates to a beam guiding apparatus (3) for guiding a laser beam (4) from a radiation source (2) towards a target area (5) in which a target material (6) for generating EUV radiation (7) can be placed, comprising: a focussing apparatus (10) for focussing the laser beam (4) in the target area (5), and a deflection apparatus (8, 19) designed to split the laser beam (4) into a deflected first partial beam (4a) and a second partial beam (4b) which are focussed onto two different focal positions (F1, F2) within the target area (5). The invention also relates to EUV radiation generating equipment (1) incorporating such a beam guiding apparatus (3).
IPC 8 full level
H05G 2/00 (2006.01)
CPC (source: EP)
H05G 2/008 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2015028103 A1 20150305; EP 3042551 A1 20160713; EP 3042551 B1 20170823
DOCDB simple family (application)
EP 2013068105 W 20130902; EP 13759691 A 20130902