EP 3049499 B1 20200722 - AMINE SUBSTITUTED TRISILYLAMINE AND TRIDISILYLAMINE COMPOUNDS
Title (en)
AMINE SUBSTITUTED TRISILYLAMINE AND TRIDISILYLAMINE COMPOUNDS
Title (de)
AMINSUBSTITUIERTE TRISILYLAMIN- UND TRIDISILYLAMIN-VERBINDUNGEN
Title (fr)
COMPOSÉS TRISILYLAMINES ET TRIDISILYLAMINES À SUBSTITUTION AMINE
Publication
Application
Priority
- US 201361883452 P 20130927
- US 2014056618 W 20140919
Abstract (en)
[origin: US2015094470A1] Compounds and method of preparation of Si—X and Ge—X compounds (X═N, P, As and Sb) via dehydrogenative coupling between the corresponding unsubstituted silanes and amines (including ammonia) or phosphines catalyzed by metallic catalysts is described. This new approach is based on the catalytic dehydrogenative coupling of a Si—H and a X—H moiety to form a Si—X containing compound and hydrogen gas (X═N, P, As and Sb). The process can be catalyzed by transition metal heterogenous catalysts such as Ru(0) on carbon, Pd(0) on MgO) as well as transition metal organometallic complexes that act as homogeneous catalysts. The —Si—X products produced by dehydrogenative coupling are inherently halogen free. Said compounds can be useful for the deposition of thin films by chemical vapor deposition or atomic layer deposition of Si-containing films.
IPC 8 full level
C07F 7/10 (2006.01); H01L 21/02 (2006.01)
CPC (source: EP KR US)
B01J 23/26 (2013.01 - KR); B01J 23/40 (2013.01 - KR); B01J 23/462 (2013.01 - KR); B01J 23/70 (2013.01 - KR); B01J 31/1616 (2013.01 - KR); C07F 7/025 (2013.01 - KR US); C07F 7/10 (2013.01 - EP KR US); C07F 7/21 (2013.01 - KR); C23C 16/442 (2013.01 - KR); C23C 16/45525 (2013.01 - KR); C23C 16/50 (2013.01 - KR); C23C 16/505 (2013.01 - KR); H01L 21/02208 (2013.01 - KR); H01L 21/0228 (2013.01 - KR); H01L 21/02617 (2013.01 - US); H01L 21/02219 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
US 2015094470 A1 20150402; US 9382269 B2 20160705; CN 105793270 A 20160720; CN 105793270 B 20190927; CN 105849221 A 20160810; CN 105849221 B 20190618; CN 108766872 A 20181106; CN 108766872 B 20221101; EP 3049421 A2 20160803; EP 3049421 A4 20170503; EP 3049421 B1 20200701; EP 3049499 A1 20160803; EP 3049499 A4 20170531; EP 3049499 B1 20200722; JP 2016536276 A 20161124; JP 2016537305 A 20161201; JP 6500014 B2 20190410; JP 6529184 B2 20190612; KR 102291427 B1 20210818; KR 102326396 B1 20211112; KR 20160062145 A 20160601; KR 20160071402 A 20160621; SG 10201804678T A 20180730; SG 11201602190P A 20160428; SG 11201602301W A 20160428; TW 201522355 A 20150616; TW 201522356 A 20150616; TW I657092 B 20190421; TW I658044 B 20190501; US 10494387 B2 20191203; US 10501484 B2 20191210; US 11274112 B2 20220315; US 11780859 B2 20231010; US 2016215003 A1 20160728; US 2016237099 A1 20160818; US 2016362429 A1 20161215; US 2018162883 A1 20180614; US 2018230171 A1 20180816; US 2020040013 A1 20200206; US 2022153762 A1 20220519; US 9453035 B2 20160927; US 9920077 B2 20180320; US 9920078 B2 20180320; WO 2015047914 A1 20150402; WO 2015048237 A2 20150402; WO 2015048237 A3 20151105
DOCDB simple family (application)
US 201414491581 A 20140919; CN 201480053247 A 20140925; CN 201480064594 A 20140919; CN 201810781647 A 20140925; EP 14847137 A 20140925; EP 14849790 A 20140919; JP 2016517351 A 20140925; JP 2016517387 A 20140919; KR 20167011263 A 20140919; KR 20167011267 A 20140925; SG 10201804678T A 20140925; SG 11201602190P A 20140925; SG 11201602301W A 20140919; TW 103133646 A 20140926; TW 103133694 A 20140926; US 2014056618 W 20140919; US 2014057377 W 20140925; US 201415025198 A 20140919; US 201615088495 A 20160401; US 201615245559 A 20160824; US 201815890538 A 20180207; US 201815892839 A 20180209; US 201916601188 A 20191014; US 202217665282 A 20220204