EP 3061127 A1 20160831 - MULTI-MAGNET ARRANGEMENT
Title (en)
MULTI-MAGNET ARRANGEMENT
Title (de)
MULTIMAGNETRONANORDNUNG
Title (fr)
AGENCEMENT DE PLUSIEURS MAGNÉTRONS
Publication
Application
Priority
- DE 102013221680 A 20131024
- EP 2014072762 W 20141023
Abstract (en)
[origin: WO2015059228A1] The invention relates to a method for processing surfaces of workpieces, preferably of large substrates, and to a device for performing the method. According to the invention the processing devices are arranged on the cylindrical surface of a drum-like carrier in a vacuum chamber. The workpiece is transported over the drum and optionally caused to rotate. The drum-like carrier is rotated in such a way that the intended processing device faces the workpiece and can process the workpiece. The surface section to be processed can be selected by translating and rotating the workpiece.
IPC 8 full level
H01L 21/677 (2006.01); C23C 14/35 (2006.01); H01J 37/34 (2006.01)
CPC (source: EP KR US)
C23C 14/35 (2013.01 - US); H01J 37/3405 (2013.01 - US); H01J 37/3435 (2013.01 - EP KR US); H01J 37/3455 (2013.01 - US); H01J 37/3458 (2013.01 - US); H01J 37/3479 (2013.01 - US); H01L 21/67207 (2013.01 - KR); H01L 21/67706 (2013.01 - KR); H01L 21/67709 (2013.01 - KR); H01L 21/6776 (2013.01 - EP KR US)
Citation (search report)
See references of WO 2015059228A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2015059228 A1 20150430; CN 105793976 A 20160720; EP 3061127 A1 20160831; JP 2017501306 A 20170112; KR 20160075708 A 20160629; US 2016237555 A1 20160818
DOCDB simple family (application)
EP 2014072762 W 20141023; CN 201480065908 A 20141023; EP 14789812 A 20141023; JP 2016549632 A 20141023; KR 20167013772 A 20141023; US 201415031721 A 20141023