Global Patent Index - EP 3064603 B1

EP 3064603 B1 20181128 - SILVER ALLOY FILM, AND SPUTTERING TARGET FOR FORMING SILVER ALLOY FILM

Title (en)

SILVER ALLOY FILM, AND SPUTTERING TARGET FOR FORMING SILVER ALLOY FILM

Title (de)

SILBERLEGIERUNGSFILM UND SPUTTERTARGET ZUR BILDUNG DES SILBERLEGIERUNGSFILMS

Title (fr)

FILM D'ALLIAGE D'ARGENT ET CIBLE DE PULVÉRISATION CATHODIQUE POUR LA FORMATION D'UN FILM D'ALLIAGE D'ARGENT

Publication

EP 3064603 B1 20181128 (EN)

Application

EP 15776508 A 20150318

Priority

  • JP 2014080354 A 20140409
  • JP 2015058051 W 20150318

Abstract (en)

[origin: EP3064603A1] This Ag alloy film includes: In: 0.1% by mass to 1.5% by mass; and Cu: 1 ppm by mass to 50 ppm by mass, with the remainder being Ag and inevitable impurities. This sputtering target includes: In: 0.1% by mass to 1.5% by mass; and Cu: 1 ppm by mass to 50 ppm by mass, with the remainder being Ag and inevitable impurities, in which an oxygen concentration is less than 50 ppm by mass, an area of a sputtering surface is 0.25 m 2 or more, and an in-plane Cu concentration distribution D Cu (=(Ã Cu /µ Cu )×100) is 40% or less.

IPC 8 full level

C22C 5/06 (2006.01); C23C 14/16 (2006.01); C23C 14/34 (2006.01); H01B 1/02 (2006.01); H01B 5/02 (2006.01)

CPC (source: EP KR)

C22C 5/06 (2013.01 - EP KR); C23C 14/14 (2013.01 - KR); C23C 14/165 (2013.01 - EP); C23C 14/34 (2013.01 - KR); C23C 14/3407 (2013.01 - KR); C23C 14/3414 (2013.01 - EP); H01B 1/02 (2013.01 - EP KR); H01B 5/02 (2013.01 - KR)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DOCDB simple family (publication)

EP 3064603 A1 20160907; EP 3064603 A4 20170329; EP 3064603 B1 20181128; CN 105793449 A 20160720; CN 105793449 B 20170929; EP 3428296 A1 20190116; JP 2015199996 A 20151112; JP 5850077 B2 20160203; KR 101686778 B1 20161214; KR 20160071476 A 20160621; SG 11201604690Q A 20160728; TW 201602363 A 20160116; TW I645052 B 20181221; WO 2015156093 A1 20151015

DOCDB simple family (application)

EP 15776508 A 20150318; CN 201580002653 A 20150318; EP 18186524 A 20150318; JP 2014080354 A 20140409; JP 2015058051 W 20150318; KR 20167014788 A 20150318; SG 11201604690Q A 20150318; TW 104109561 A 20150325