EP 3067560 B1 20201118 - Vacuum pump with at least one pump stage
Title (en)
Vacuum pump with at least one pump stage
Title (de)
Vakuumpumpe mit wenigstens einer Pumpstufe
Title (fr)
Pompe à vide dotée d'au moins un étage
Publication
Application
Priority
EP 15158724 A 20150312
Abstract (en)
[origin: JP2016169731A] PROBLEM TO BE SOLVED: To provide a method capable of prolonging a service life of an abradable seal in a vacuum pump, and detecting abrasion of the seal in the vacuum pump early.SOLUTION: A vacuum pump 101 has at least one pump stage, a motor and a motor control part. In the vacuum pump that is a dry operation type vacuum pump having an abradable seal 148, at least one pressure sensor 51 is provided ahead of a first pump stage and/or in at least one compression chamber in the vacuum pump. The pressure sensor 51 is connected to an evaluation unit 53.SELECTED DRAWING: Figure 3
IPC 8 full level
F04C 23/00 (2006.01); F04B 37/14 (2006.01); F04B 39/04 (2006.01); F04B 49/20 (2006.01); F04C 18/02 (2006.01); F04C 25/02 (2006.01); F04C 28/08 (2006.01); F04C 29/00 (2006.01)
CPC (source: EP)
F04B 37/14 (2013.01); F04B 39/041 (2013.01); F04B 49/20 (2013.01); F04C 18/0215 (2013.01); F04C 23/001 (2013.01); F04C 25/02 (2013.01); F04C 28/08 (2013.01); F04C 29/0085 (2013.01); F04B 2205/01 (2013.01); F04B 2205/03 (2013.01); F04C 2220/12 (2013.01); F04C 2270/0525 (2013.01); F04C 2270/185 (2013.01)
Citation (opposition)
Opponent : Edwards Limited,
- US 2014322055 A1 20141030 - CALHOUN JOHN [US]
- CA 2752655 A1 20130313 - ALLAN R NELSON ENGINEERING 1997 INC [CA]
- US 5718565 A 19980217 - KUHN MONIKA [DE], et al
- JP 2006322405 A 20061130 - DENSO CORP
- US 2001001950 A1 20010531 - KAWAMURA TAKESHI [JP], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3067560 A1 20160914; EP 3067560 B1 20201118; JP 2016169731 A 20160923; JP 6188850 B2 20170830
DOCDB simple family (application)
EP 15158724 A 20150312; JP 2016039622 A 20160302