Global Patent Index - EP 3067560 B1

EP 3067560 B1 20201118 - Vacuum pump with at least one pump stage

Title (en)

Vacuum pump with at least one pump stage

Title (de)

Vakuumpumpe mit wenigstens einer Pumpstufe

Title (fr)

Pompe à vide dotée d'au moins un étage

Publication

EP 3067560 B1 20201118 (DE)

Application

EP 15158724 A 20150312

Priority

EP 15158724 A 20150312

Abstract (en)

[origin: JP2016169731A] PROBLEM TO BE SOLVED: To provide a method capable of prolonging a service life of an abradable seal in a vacuum pump, and detecting abrasion of the seal in the vacuum pump early.SOLUTION: A vacuum pump 101 has at least one pump stage, a motor and a motor control part. In the vacuum pump that is a dry operation type vacuum pump having an abradable seal 148, at least one pressure sensor 51 is provided ahead of a first pump stage and/or in at least one compression chamber in the vacuum pump. The pressure sensor 51 is connected to an evaluation unit 53.SELECTED DRAWING: Figure 3

IPC 8 full level

F04C 23/00 (2006.01); F04B 37/14 (2006.01); F04B 39/04 (2006.01); F04B 49/20 (2006.01); F04C 18/02 (2006.01); F04C 25/02 (2006.01); F04C 28/08 (2006.01); F04C 29/00 (2006.01)

CPC (source: EP)

F04B 37/14 (2013.01); F04B 39/041 (2013.01); F04B 49/20 (2013.01); F04C 18/0215 (2013.01); F04C 23/001 (2013.01); F04C 25/02 (2013.01); F04C 28/08 (2013.01); F04C 29/0085 (2013.01); F04B 2205/01 (2013.01); F04B 2205/03 (2013.01); F04C 2220/12 (2013.01); F04C 2270/0525 (2013.01); F04C 2270/185 (2013.01)

Citation (opposition)

Opponent : Edwards Limited,

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DOCDB simple family (publication)

EP 3067560 A1 20160914; EP 3067560 B1 20201118; JP 2016169731 A 20160923; JP 6188850 B2 20170830

DOCDB simple family (application)

EP 15158724 A 20150312; JP 2016039622 A 20160302