EP 3071837 A1 20160928 - VACUUM PUMP SYSTEM AND METHOD FOR OPERATING A VACUUM PUMP SYSTEM
Title (en)
VACUUM PUMP SYSTEM AND METHOD FOR OPERATING A VACUUM PUMP SYSTEM
Title (de)
VAKUUMPUMPEN-SYSTEM SOWIE VERFAHREN ZUM BETREIBEN EINES VAKUUMPUMPEN-SYSTEMS
Title (fr)
SYSTÈME DE POMPE À VIDE ET PROCÉDÉ POUR FAIRE FONCTIONNER UN SYSTÈME DE POMPE À VIDE
Publication
Application
Priority
- DE 102013223556 A 20131119
- EP 2014073681 W 20141104
Abstract (en)
[origin: WO2015074865A1] The invention relates to a vacuum pump system comprising a vacuum pump (10), in particular in the form of a screw pump. Said system is used for evacuating a chamber (16). When a desired set pressure in the chamber (16) is reached, the vacuum pump system can be operated in a standby mode. To this end, an outlet conduit (22) is connected to an inlet conduit (30) via a bypass conduit (24). In standby mode, the inlet valve (18) is closed and a bypass valve (26) is open, such that medium in the circuit can be conveyed by the vacuum pump (10). As a result, the vacuum pump is maintained substantially at operating temperature.
IPC 8 full level
F04C 25/02 (2006.01); F04C 28/02 (2006.01); F04C 28/06 (2006.01); F04C 28/08 (2006.01)
CPC (source: EP KR)
F04C 18/16 (2013.01 - KR); F04C 25/02 (2013.01 - EP KR); F04C 28/02 (2013.01 - EP KR); F04C 28/06 (2013.01 - EP KR); F04C 28/08 (2013.01 - EP KR); F04C 18/16 (2013.01 - EP); F04C 2220/12 (2013.01 - EP KR)
Citation (search report)
See references of WO 2015074865A1
Citation (examination)
CN 202468224 U 20121003 - SICHUAN KELUN PHARMACEUTICAL
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2015074865 A1 20150528; CN 105829723 A 20160803; CN 105829723 B 20180216; DE 102013223556 A1 20150521; EP 3071837 A1 20160928; KR 20160085782 A 20160718
DOCDB simple family (application)
EP 2014073681 W 20141104; CN 201480062828 A 20141104; DE 102013223556 A 20131119; EP 14793138 A 20141104; KR 20167012915 A 20141104