EP 3072994 A1 20160928 - FLOODING DEVICE FOR A HORIZONTAL GALVANIC OR WET-CHEMICAL PROCESS LINE FOR METAL DEPOSITION ON A SUBSTRATE
Title (en)
FLOODING DEVICE FOR A HORIZONTAL GALVANIC OR WET-CHEMICAL PROCESS LINE FOR METAL DEPOSITION ON A SUBSTRATE
Title (de)
ÜBERFLUTUNGSVORRICHTUNG FÜR EINE HORIZONTALE GALVANISCHE ODER NASSCHEMISCHE PROZESSLINIE ZUR METALLABSCHEIDUNG AUF EINEM SUBSTRAT
Title (fr)
DISPOSITIF D'INONDATION POUR UNE LIGNE DE PROCESSUS GALVANIQUE HORIZONTAL OU CHIMIQUE PAR VOIE HUMIDE POUR LE DÉPÔT D'UN MÉTAL SUR UN SUBSTRAT
Publication
Application
Priority
EP 15161394 A 20150327
Abstract (en)
The present invention is related to a flooding device for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated, wherein the flooding device comprises at least a flooding element and at least a first substrate guiding element, wherein said flooding element is mechanically connected to the at least first substrate guiding element, and wherein the first substrate guiding element is spatially arranged on the entry side of the flooding element. The present invention is further related to a treating module of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated comprising at least one pair of oppositely arranged such flooding devices.
IPC 8 full level
C25D 7/06 (2006.01); C25D 17/00 (2006.01); C23C 18/16 (2006.01); C25D 21/08 (2006.01)
CPC (source: EP)
C25D 7/0621 (2013.01); C25D 17/00 (2013.01); C23C 18/1619 (2013.01); C25D 21/08 (2013.01)
Citation (search report)
- [XI] EP 0054302 A1 19820623 - NIPPON STEEL CORP [JP]
- [X] EP 0520324 A1 19921230 - SCHMID GMBH & CO GEB [DE]
- [XI] DE 19717511 A1 19981029 - ATOTECH DEUTSCHLAND GMBH [DE]
- [X] EP 0894561 A2 19990203 - TELEDYNE IND [US]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3072994 A1 20160928; EP 3072994 B1 20180808; CN 107636210 A 20180126; CN 107636210 B 20191112; JP 2018511703 A 20180426; JP 6748106 B2 20200826; KR 102056528 B1 20191216; KR 20170131518 A 20171129; TW 201706462 A 20170216; TW I685589 B 20200221; WO 2016156067 A1 20161006
DOCDB simple family (application)
EP 15161394 A 20150327; CN 201680018314 A 20160318; EP 2016055971 W 20160318; JP 2017550763 A 20160318; KR 20177030116 A 20160318; TW 105109546 A 20160325