Global Patent Index - EP 3072994 B1

EP 3072994 B1 20180808 - FLOODING DEVICE FOR A HORIZONTAL GALVANIC OR WET-CHEMICAL PROCESS LINE FOR METAL DEPOSITION ON A SUBSTRATE

Title (en)

FLOODING DEVICE FOR A HORIZONTAL GALVANIC OR WET-CHEMICAL PROCESS LINE FOR METAL DEPOSITION ON A SUBSTRATE

Title (de)

ÜBERFLUTUNGSVORRICHTUNG FÜR EINE HORIZONTALE GALVANISCHE ODER NASSCHEMISCHE PROZESSLINIE ZUR METALLABSCHEIDUNG AUF EINEM SUBSTRAT

Title (fr)

DISPOSITIF D'INONDATION POUR UNE LIGNE DE PROCESSUS GALVANIQUE HORIZONTAL OU CHIMIQUE PAR VOIE HUMIDE POUR LE DÉPÔT D'UN MÉTAL SUR UN SUBSTRAT

Publication

EP 3072994 B1 20180808 (EN)

Application

EP 15161394 A 20150327

Priority

EP 15161394 A 20150327

Abstract (en)

[origin: EP3072994A1] The present invention is related to a flooding device for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated, wherein the flooding device comprises at least a flooding element and at least a first substrate guiding element, wherein said flooding element is mechanically connected to the at least first substrate guiding element, and wherein the first substrate guiding element is spatially arranged on the entry side of the flooding element. The present invention is further related to a treating module of a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated comprising at least one pair of oppositely arranged such flooding devices.

IPC 8 full level

C25D 7/06 (2006.01); C25D 17/00 (2006.01); C23C 18/16 (2006.01); C25D 21/08 (2006.01)

CPC (source: EP)

C25D 7/0621 (2013.01); C25D 17/00 (2013.01); C23C 18/1619 (2013.01); C25D 21/08 (2013.01)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DOCDB simple family (publication)

EP 3072994 A1 20160928; EP 3072994 B1 20180808; CN 107636210 A 20180126; CN 107636210 B 20191112; JP 2018511703 A 20180426; JP 6748106 B2 20200826; KR 102056528 B1 20191216; KR 20170131518 A 20171129; TW 201706462 A 20170216; TW I685589 B 20200221; WO 2016156067 A1 20161006

DOCDB simple family (application)

EP 15161394 A 20150327; CN 201680018314 A 20160318; EP 2016055971 W 20160318; JP 2017550763 A 20160318; KR 20177030116 A 20160318; TW 105109546 A 20160325