EP 3083140 A4 20170906 - POLISHING CUSHION, POLISHING APPARATUS, POLISHING METHOD, AND ARTICLE INCLUDING OBJECT POLISHED BY THE POLISHING METHOD
Title (en)
POLISHING CUSHION, POLISHING APPARATUS, POLISHING METHOD, AND ARTICLE INCLUDING OBJECT POLISHED BY THE POLISHING METHOD
Title (de)
POLIERKISSEN, POLIERVORRICHTUNG, POLIERVERFAHREN UND ARTIKEL MIT DURCH DAS POLIERVERFAHREN POLIERTEM OBJEKT
Title (fr)
COUSSINET DE POLISSAGE, APPAREIL DE POLISSAGE, PROCÉDÉ DE POLISSAGE ET ARTICLE COMPRENANT UN OBJET POLI PAR LE PROCÉDÉ DE POLISSAGE
Publication
Application
Priority
- JP 2013263590 A 20131220
- US 2014071095 W 20141218
Abstract (en)
[origin: WO2015095489A1] A polishing cushion for realizing a plurality of types of polishing with a single polishing apparatus. A polishing cushion according to one embodiment includes a first outer layer facing one out of a polishing member and a support member, a second outer layer facing the other out of the polishing member and the support member, an inner layer positioned between the first outer layer and the second outer layer; and a plurality of spaces formed in the second outer layer which the inner layer is able to enter. The hardness of the inner layer is lower than both of the hardness of the first outer layer and the hardness of the second outer layer.
IPC 8 full level
B24B 37/22 (2012.01); B24D 3/00 (2006.01); B24D 9/02 (2006.01); B24D 9/08 (2006.01); B24D 11/00 (2006.01); B24D 11/02 (2006.01)
CPC (source: EP US)
B24B 37/22 (2013.01 - EP US); B24D 3/002 (2013.01 - EP US); B24D 9/02 (2013.01 - EP US); B24D 9/08 (2013.01 - EP US); B24D 11/003 (2013.01 - EP US); B24D 11/02 (2013.01 - EP US)
Citation (search report)
- [XYI] US 2002002027 A1 20020103 - EPPERT STANLEY E [US], et al
- [Y] EP 0167679 A1 19860115 - YASUI NOBUHIKO
- [Y] US 5975999 A 19991102 - NITTA YOSHIKI [JP]
- [A] US 2010075578 A1 20100325 - CHOU HUNG-KE [TW], et al
- [A] EP 1661665 A1 20060531 - MATSUSHITA ELECTRIC IND CO LTD [JP], et al
- [XP] JP 2014151410 A 20140825 - FUJIBO HOLDINGS INC
- See references of WO 2015095489A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2015095489 A1 20150625; CN 105829022 A 20160803; CN 105829022 B 20190528; EP 3083140 A1 20161026; EP 3083140 A4 20170906; JP 2015116653 A 20150625; JP 6279309 B2 20180214; TW 201544258 A 20151201; US 2016303708 A1 20161020
DOCDB simple family (application)
US 2014071095 W 20141218; CN 201480069189 A 20141218; EP 14871298 A 20141218; JP 2013263590 A 20131220; TW 103144879 A 20141222; US 201415103778 A 20141218