EP 3084524 B1 20181114 - APPARATUS FOR COATING FLAT SUBSTRATES
Title (en)
APPARATUS FOR COATING FLAT SUBSTRATES
Title (de)
VORRICHTUNG ZUM BESCHICHTEN VON PLANAREN SUBSTRATEN
Title (fr)
DISPOSITIF DE REVÊTEMENT DE SUBSTRATS PLANAIRES
Publication
Application
Priority
- DE 102013114718 A 20131220
- EP 2014076523 W 20141204
Abstract (en)
[origin: WO2015090992A1] The invention relates to a device for coating flat substrates (12), a coating head (10) having a recess (14) being moved relative to a substrate such that a coating composition (16) present in the recess is applied to the substrate.
IPC 8 full level
G03F 7/16 (2006.01); B05C 3/18 (2006.01); B05C 9/02 (2006.01); B05C 11/04 (2006.01); B05D 1/26 (2006.01); H01J 9/20 (2006.01); H01L 31/0216 (2014.01)
CPC (source: EP)
B05C 3/18 (2013.01); B05C 9/02 (2013.01); H01J 9/205 (2013.01); B05C 11/04 (2013.01); B05C 11/047 (2013.01); G03F 7/16 (2013.01)
Citation (examination)
- US 4993354 A 19910219 - MAKITA KENSUKE [JP], et al
- FR 2453684 A1 19801107 - SIV SOC ITALIANA VETRO
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2015090992 A1 20150625; DE 102013114718 A1 20150625; EP 3084524 A1 20161026; EP 3084524 B1 20181114; ES 2710210 T3 20190423
DOCDB simple family (application)
EP 2014076523 W 20141204; DE 102013114718 A 20131220; EP 14812423 A 20141204; ES 14812423 T 20141204