EP 3084816 A1 20161026 - WAFER BOAT
Title (en)
WAFER BOAT
Title (de)
WAFERBOOT
Title (fr)
NACELLE PORTE-PLAQUETTES
Publication
Application
Priority
- DE 102013021922 A 20131220
- DE 102014002280 A 20140219
- EP 2014078902 W 20141219
Abstract (en)
[origin: WO2015092038A1] Disclosed is a wafer boat for holding wafers, in particular semiconductor wafers. The wafer boat comprises at least two elongate holding elements made of quartz, which each have a plurality of parallel holding slots extending transversely to the longitudinal extension, as well as two end plates, between which the holding elements are arranged and fastened in such a way that the holding slots of the holding elements are oriented towards one another. In order to increase the stability of the wafer boat, it has a plurality of fastening attachments via which the holding elements are fastened to the end plates, wherein each fastening attachment is at least 1.5 times as large as a holding region of the holding elements that contains the receiving slots, and wherein each fastening attachment is welded or bonded to at least one of the following elements: an end plate and a holding element. In a further embodiment, which can be combined with the first-mentioned embodiment, the holding elements have, next to the end plates, at least one load relief slot, preferably at least two load relief slots, having a depth that is smaller than the depth of the holding slots, wherein, if there are at least two load relief slots, the depth increases as the distance from the end plates increases.
IPC 8 full level
H01L 21/673 (2006.01)
CPC (source: EP KR US)
H01L 21/67109 (2013.01 - US); H01L 21/67313 (2013.01 - EP KR US); H01L 21/67316 (2013.01 - US); H01L 21/67346 (2013.01 - KR); H01L 21/67383 (2013.01 - KR)
Citation (search report)
See references of WO 2015092038A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2015092038 A1 20150625; CN 106030778 A 20161012; DE 102014019371 A1 20150625; EP 3084816 A1 20161026; KR 20160101130 A 20160824; TW 201529444 A 20150801; TW I657986 B 20190501; US 2016315003 A1 20161027
DOCDB simple family (application)
EP 2014078902 W 20141219; CN 201480074104 A 20141219; DE 102014019371 A 20141222; EP 14825330 A 20141219; KR 20167019575 A 20141219; TW 103144504 A 20141219; US 201415105792 A 20141219