EP 3106865 B1 20200610 - ION SENSOR BASED ON DIFFERENTIAL MEASUREMENT, AND PRODUCTION METHOD
Title (en)
ION SENSOR BASED ON DIFFERENTIAL MEASUREMENT, AND PRODUCTION METHOD
Title (de)
AUF DIFFERENTIELLER MESSUNG BASIERENDER IONENSENSOR UND HERSTELLUNGSVERFAHREN
Title (fr)
CAPTEUR D'IONS REALISANT DES MESURES DIFFERENTIELLES ET SON PROCÉDÉ DE FABRICATION
Publication
Application
Priority
- ES 201430180 A 20140211
- ES 2015070063 W 20150129
Abstract (en)
[origin: EP3106865A1] The invention relates to an ion sensor based on differential measurement, comprising an ISFET/REFET pair, wherein the REFET is defined by a structure formed by an ISFET covered by a micro-reservoir containing an internal reference solution. The sensor comprises: a first and a second ion-selective field effect transistor; an electrode; a substrate on the surface of which the two transistors, connection tracks and the electrode are integrated; and a structure adhered to the first ion-selective field effect transistor, creating a micro-reservoir on the gate of said first transistor, said micro-reservoir having a micro-channel connecting the micro-reservoir with the exterior, and said micro-reservoir being filled with the reference solution
IPC 8 full level
G01N 27/414 (2006.01); H01L 21/78 (2006.01); H01L 23/31 (2006.01); H01L 27/12 (2006.01)
CPC (source: CN EP ES KR US)
B81B 7/00 (2013.01 - ES); G01N 27/414 (2013.01 - CN EP ES KR US); H01L 21/78 (2013.01 - US); H01L 23/3157 (2013.01 - US); H01L 27/1203 (2013.01 - US); H01L 2224/05554 (2013.01 - EP US); H01L 2224/48091 (2013.01 - EP US); H01L 2224/8592 (2013.01 - EP US); H01L 2924/16235 (2013.01 - EP US)
C-Set (source: EP US)
Citation (examination)
ERRACHID A ET AL: "A simple REFET for pH detection in differential mode", SENSORS AND ACTUATORS B: CHEMICAL: INTERNATIONAL JOURNAL DEVOTED TO RESEARCH AND DEVELOPMENT OF PHYSICAL AND CHEMICAL TRANSDU, ELSEVIER BV, NL, vol. 60, no. 1, 2 November 1999 (1999-11-02), pages 43 - 48, XP004244599, ISSN: 0925-4005, DOI: 10.1016/S0925-4005(99)00242-7
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3106865 A1 20161221; EP 3106865 B1 20200610; CA 2938155 A1 20150820; CN 106104265 A 20161109; ES 2542927 A2 20150812; ES 2542927 R1 20150909; ES 2818111 T3 20210409; JP 2017505443 A 20170216; KR 20160119096 A 20161012; MX 2016010017 A 20161007; US 10067085 B2 20180904; US 10436743 B2 20191008; US 11029278 B2 20210608; US 2017010237 A1 20170112; US 2019017958 A1 20190117; US 2020025710 A1 20200123; WO 2015121516 A1 20150820
DOCDB simple family (application)
EP 15708848 A 20150129; CA 2938155 A 20150129; CN 201580007758 A 20150129; ES 15708848 T 20150129; ES 201430180 A 20140211; ES 2015070063 W 20150129; JP 2016550810 A 20150129; KR 20167021498 A 20150129; MX 2016010017 A 20150129; US 201515113381 A 20150129; US 201816021926 A 20180628; US 201916530574 A 20190802