EP 3112688 B1 20190612 - SPLIT FLOW VACUUM PUMP AND VACUUM SYSTEM WITH A SPLIT FLOW VACUUM PUMP
Title (en)
SPLIT FLOW VACUUM PUMP AND VACUUM SYSTEM WITH A SPLIT FLOW VACUUM PUMP
Title (de)
SPLITFLOW-VAKUUMPUMPE SOWIE VAKUUM-SYSTEM MIT EINER SPLITFLOW-VAKUUMPUMPE
Title (fr)
POMPE À VIDE À DÉBIT PARTAGÉ ET SYSTÈME À VIDE DOTÉ D'UNE POMPE À DÉBIT PARTAGÉ
Publication
Application
Priority
EP 15174844 A 20150701
Abstract (en)
[origin: JP2017020502A] PROBLEM TO BE SOLVED: To provide a split flow vacuum pump capable of increasing a number of inlets without increasing a number of disposed pump stages.SOLUTION: A split flow vacuum pump has at least three radial inlets and at least four pump stages, where at least one pump stage is formed as a turbo molecular pump stage, and at least three inlets are formed as main inlets and axially disposed between the pump stages. Additionally, at least one radial sub-inlet (27, 28, 52) is disposed, and the sub-inlet is disposed in a region of the at least one turbo molecular pump stage (21, 22, 44, 45, 46).SELECTED DRAWING: Figure 1
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/053 (2006.01); F04D 29/52 (2006.01); F04D 29/58 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 29/053 (2013.01); F04D 29/522 (2013.01); F04D 29/5853 (2013.01); F04D 19/04 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3112688 A1 20170104; EP 3112688 B1 20190612; EP 3112688 B2 20220511; JP 2017020502 A 20170126; JP 6253719 B2 20171227
DOCDB simple family (application)
EP 15174844 A 20150701; JP 2016128671 A 20160629