EP 3120397 A1 20170125 - TRANSPARENT SUBSTRATE FOR PHOTONIC DEVICES
Title (en)
TRANSPARENT SUBSTRATE FOR PHOTONIC DEVICES
Title (de)
TRANSPARENTES SUBSTRAT FÜR FOTONISCHE BAUELEMENTE
Title (fr)
SUBSTRAT TRANSPARENT POUR DISPOSITIFS PHOTONIQUES
Publication
Application
Priority
- EP 14160316 A 20140317
- EP 2015055394 W 20150316
Abstract (en)
[origin: WO2015140090A1] The invention pertains to a transparent substrate (1) for photonic devices comprising a support (10) and an electrode (11), said electrode (11) comprising a stack of layers comprising, starting from the support (10), successively, a first dielectric layer (110), a metal conduction layer (111), a buffer layer (112) and a final dielectric nitride based layer (113). According to the invention, said buffer layer (112) is in direct contact with the metal conduction layer (111) and said final dielectric nitride based layer (113) is in direct contact with the buffer layer (112).
IPC 8 full level
H01L 51/52 (2006.01); C03C 17/36 (2006.01)
CPC (source: EP)
C03C 17/36 (2013.01); C03C 17/3613 (2013.01); C03C 17/3639 (2013.01); C03C 17/3644 (2013.01); C03C 17/3671 (2013.01); H10K 50/816 (2023.02); H10K 50/826 (2023.02)
Citation (search report)
See references of WO 2015140090A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DOCDB simple family (application)
EP 2015055394 W 20150316; EP 15710170 A 20150316