EP 3126068 A1 20170208 - HYPERBARIC METHODS AND SYSTEMS FOR SURFACE TREATMENT, CLEANING, AND DRYING: THIN LIQUID H-CNX
Title (en)
HYPERBARIC METHODS AND SYSTEMS FOR SURFACE TREATMENT, CLEANING, AND DRYING: THIN LIQUID H-CNX
Title (de)
HYPERBARISCHE VERFAHREN UND SYSTEME ZUR OBERFLÄCHENBEHANDLUNG, -REINIGUNG UND -TROCKNUNG: DÜNNFLÜSSIGE H-CNX
Title (fr)
PROCÉDÉS ET SYSTÈMES HYPERBARES DE TRAITEMENT, NETTOYAGE ET SÉCHAGE DE SURFACE : COUCHE MINCE LIQUIDE DE NITRURE DE CARBONE TERMINÉ PAR UN ATOME D'HYDROGÈNE
Publication
Application
Priority
- US 201361836653 P 20130618
- US 2014043049 W 20140618
Abstract (en)
[origin: WO2014205143A1] Objects with complex surface profiles can be cleaned effectively using hyperbaric pressures. A high temperature high pressure liquid or vapor can be introduced to a sealed chamber containing an object to be cleaned, forming a thin liquid layer on the object. The pressure in the sealed chamber can be quickly reduced, evaporating the thin liquid layer, which can remove surface contaminants from the object. The process can be repeated until the object is cleaned.
IPC 8 full level
B08B 3/04 (2006.01); B08B 3/10 (2006.01); B08B 7/04 (2006.01); H01L 21/302 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP)
B08B 3/00 (2013.01); B08B 7/0064 (2013.01); B08B 7/04 (2013.01); B08B 2230/01 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2014205143 A1 20141224; EP 3126068 A1 20170208; EP 3126068 A4 20171129; TW 201509553 A 20150316
DOCDB simple family (application)
US 2014043049 W 20140618; EP 14814322 A 20140618; TW 103121120 A 20140618