EP 3137648 A1 20170308 - METHOD AND DEVICE FOR CONTINUOUSLY SUPPLING A PRECURSOR
Title (en)
METHOD AND DEVICE FOR CONTINUOUSLY SUPPLING A PRECURSOR
Title (de)
VERFAHREN UND VORRICHTUNG ZUR KONTINUIERLICHEN PRÄKURSORZUFÜHRUNG
Title (fr)
PROCÉDÉ ET DISPOSITIF D'ACHEMINEMENT EN CONTINU DE PRÉCURSEURS
Publication
Application
Priority
- DE 102014106129 A 20140430
- EP 2015058432 W 20150417
Abstract (en)
[origin: WO2015165758A1] The invention relates to a method for supplying at least one precursor to a plurality of coating modules of a coating device and to a corresponding coating device, in particular a plasma coating device. The aim of the method is to provide a method and a simple device for coating, with which a precursor or precursors of a plurality of coating modules can be continuously provided with the same precursor level and a continuous coating operation is guaranteed, according to claim 1.
IPC 8 full level
C23C 16/455 (2006.01); B01D 1/00 (2006.01); B67D 3/00 (2006.01); C23C 16/448 (2006.01); F17C 13/00 (2006.01)
CPC (source: CN EP US)
B01D 1/0082 (2013.01 - CN EP US); C23C 14/246 (2013.01 - EP US); C23C 16/448 (2013.01 - CN EP US); C23C 16/4481 (2013.01 - US); C23C 16/4482 (2013.01 - CN EP US); C23C 16/45561 (2013.01 - CN EP US)
Citation (search report)
See references of WO 2015165758A1
Citation (examination)
DE 112005001190 B4 20140213 - SIDRABE INC [LV]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102014106129 A1 20151105; CN 106232866 A 20161214; CN 106232866 B 20181225; EP 3137648 A1 20170308; US 10287678 B2 20190514; US 2017058400 A1 20170302; WO 2015165758 A1 20151105
DOCDB simple family (application)
DE 102014106129 A 20140430; CN 201580021576 A 20150417; EP 15720624 A 20150417; EP 2015058432 W 20150417; US 201515307978 A 20150417