EP 3137771 B1 20200506 - METHOD OF PUMPING IN A PUMPING SYSTEM AND VACUUM PUMP SYSTEM
Title (en)
METHOD OF PUMPING IN A PUMPING SYSTEM AND VACUUM PUMP SYSTEM
Title (de)
VERFAHREN ZUM PUMPEN IN EINEM PUMPSYSTEM UND VAKUUMPUMPENSYSTEM
Title (fr)
MÉTHODE DE POMPAGE DANS UN SYSTÈME DE POMPAGE ET SYSTÈME DE POMPES À VIDE
Publication
Application
Priority
EP 2014058948 W 20140501
Abstract (en)
[origin: WO2015165544A1] The present invention relates to a method of pumping in a pumping system (SP, SPP) comprising: a primary lubricated vane screw vacuum pump (3) with a gas inlet opening (2) linked to a vacuum chamber (1) and a gas outlet opening (4) that opens into a conduit (5) before opening into the gas outlet (8) of the pumping system (SP, SPP), a check valve (6) positioned in the conduit (5) between the gas outlet opening (4) and the gas outlet (8), and an ejector (7) connected in parallel with the check valve (6). According to said method, the primary lubricated vane screw vacuum pump (3) is operated in order to pump the gases contained in the vacuum pump (1) through the gas outlet opening (4); simultaneously, the ejector (7) is supplied with motive medium, and the ejector (7) continues to be supplied with motive medium throughout the time that the primary lubricated vane vacuum pump (3) is pumping the gases contained in the vacuum chamber (1) and/or throughout the time that the primary lubricated vane vacuum pump (3) is maintaining a predefined pressure in the vacuum chamber (1). The present invention also relates to a pumping system (SP, SPP) suitable for being used for implementing said method.
IPC 8 full level
F04C 23/00 (2006.01); F04B 37/14 (2006.01); F04C 25/02 (2006.01); F04F 5/20 (2006.01); F04F 5/54 (2006.01)
CPC (source: EP KR RU US)
F04B 37/14 (2013.01 - EP KR US); F04C 18/344 (2013.01 - EP KR RU US); F04C 23/005 (2013.01 - EP KR RU US); F04C 25/02 (2013.01 - EP KR RU US); F04C 28/06 (2013.01 - EP KR US); F04C 29/0028 (2013.01 - US); F04C 29/02 (2013.01 - US); F04F 5/20 (2013.01 - EP KR US); F04F 5/54 (2013.01 - EP KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2015165544 A1 20151105; AU 2014392229 A1 20161103; AU 2014392229 B2 20181122; BR 112016024380 A2 20170815; BR 112016024380 B1 20220628; CA 2944825 A1 20151105; CA 2944825 C 20210427; CN 106255828 A 20161221; DK 3137771 T3 20200608; EP 3137771 A1 20170308; EP 3137771 B1 20200506; ES 2797400 T3 20201202; JP 2017515031 A 20170608; JP 6410836 B2 20181024; KR 102235562 B1 20210405; KR 20170005410 A 20170113; PL 3137771 T3 20201005; PT 3137771 T 20200529; RU 2016142607 A 20180601; RU 2016142607 A3 20180601; RU 2666379 C2 20180907; TW 201608134 A 20160301; TW I698585 B 20200711; US 2017045051 A1 20170216
DOCDB simple family (application)
EP 2014058948 W 20140501; AU 2014392229 A 20140501; BR 112016024380 A 20140501; CA 2944825 A 20140501; CN 201480078447 A 20140501; DK 14721361 T 20140501; EP 14721361 A 20140501; ES 14721361 T 20140501; JP 2016559425 A 20140501; KR 20167030629 A 20140501; PL 14721361 T 20140501; PT 14721361 T 20140501; RU 2016142607 A 20140501; TW 104114058 A 20150501; US 201415306175 A 20140501