EP 3140849 A4 20181205 - SCANNING ELECTRON MICROSCOPE AND METHODS OF INSPECTING AND REVIEWING SAMPLES
Title (en)
SCANNING ELECTRON MICROSCOPE AND METHODS OF INSPECTING AND REVIEWING SAMPLES
Title (de)
RASTERELEKTRONENMIKROSKOP UND VERFAHREN ZUR ÜBERPRÜFUNG UND DURCHSICHT VON PROBEN
Title (fr)
MICROSCOPE ÉLECTRONIQUE À BALAYAGE ET PROCÉDÉS D'INSPECTION ET D'EXAMEN D'ÉCHANTILLONS
Publication
Application
Priority
- US 201462043410 P 20140829
- US 201514834991 A 20150825
- US 2015047307 W 20150828
Abstract (en)
[origin: WO2016033388A1] A scanning electron microscope incorporates a multi-pixel solid-state electron detector. The multi-pixel solid-state detector may detect back-scattered and/or secondary electrons. The multi-pixel solid-state detector may incorporate analog-to-digital converters and other circuits. The multi-pixel solid state detector may be capable of approximately determining the energy of incident electrons and/or may contain circuits for processing or analyzing the electron signals. The multi-pixel solid state detector is suitable for high-speed operation such as at a speed of about 100 MHz or higher. The scanning electron microscope may be used for reviewing, inspecting or measuring a sample such an unpatterned semiconductor wafer, a patterned semiconductor wafer, a reticle or a photomask. A method of reviewing or inspecting a sample is also described.
IPC 8 full level
G01T 1/24 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01); H01L 27/146 (2006.01)
CPC (source: CN EP IL KR US)
G01N 30/72 (2013.01 - IL US); G01T 1/24 (2013.01 - EP IL US); G06T 1/00 (2013.01 - KR); H01J 37/244 (2013.01 - CN EP IL KR US); H01J 37/28 (2013.01 - CN EP IL KR US); H01J 49/02 (2013.01 - IL US); H01L 27/1464 (2013.01 - EP IL US); H01L 27/14659 (2013.01 - EP IL US); H01L 27/14661 (2013.01 - EP IL US); H01L 31/00 (2013.01 - IL KR US); H01J 2237/2441 (2013.01 - CN EP IL KR US); H01J 2237/2446 (2013.01 - CN EP IL KR US); H01J 2237/24475 (2013.01 - CN EP IL KR US); H01J 2237/24495 (2013.01 - CN EP IL KR US); H01J 2237/24592 (2013.01 - CN EP IL KR US)
Citation (search report)
- [YDA] US 2013264481 A1 20131010 - CHERN JEHN-HUAR [US], et al
- [A] US 2006278943 A1 20061214 - TURCHETTA RENATO ANDREA D [GB], et al
- [XA] US 2010039546 A1 20100218 - COHEN DAVID [IL], et al
- [Y] US 2010051804 A1 20100304 - ADAMEC PAVEL [DE]
- [Y] US 2011169116 A1 20110714 - NANVER LIS KAREN [NL], et al
- [A] US 2008230697 A1 20080925 - TANIMOTO SAYAKA [JP], et al
- [A] US 2006054817 A1 20060316 - PARKER N W [US]
- See references of WO 2016033388A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2016033388 A1 20160303; CN 106575594 A 20170419; CN 106575594 B 20190528; CN 110164745 A 20190823; CN 110164745 B 20201027; EP 3140849 A1 20170315; EP 3140849 A4 20181205; EP 3140849 B1 20210721; IL 249503 A0 20170228; IL 249503 B 20210131; IL 279706 A 20210131; IL 279706 B 20210930; JP 2017526142 A 20170907; JP 2019197733 A 20191114; JP 6549220 B2 20190724; JP 6763065 B2 20200930; KR 102302636 B1 20210914; KR 20170047244 A 20170504; TW 201621963 A 20160616; TW 201921408 A 20190601; TW I660392 B 20190521; TW I695405 B 20200601; US 10466212 B2 20191105; US 2016064184 A1 20160303; US 2017329025 A1 20171116; US 9767986 B2 20170919
DOCDB simple family (application)
US 2015047307 W 20150828; CN 201580042995 A 20150828; CN 201910348546 A 20150828; EP 15835724 A 20150828; IL 24950316 A 20161212; IL 27970620 A 20201223; JP 2017511732 A 20150828; JP 2019118348 A 20190626; KR 20177005215 A 20150828; TW 104128484 A 20150828; TW 108106178 A 20150828; US 201514834991 A 20150825; US 201715667500 A 20170802