EP 3148716 A1 20170405 - TREATMENT METHOD AND DEVICE USING A SUPERCRITICAL FLUID AND INJECTION OF ADDITIVE
Title (en)
TREATMENT METHOD AND DEVICE USING A SUPERCRITICAL FLUID AND INJECTION OF ADDITIVE
Title (de)
BEHANDLUNGSVERFAHREN UND VORRICHTUNG MIT EINER ÜBERKRITISCHEN FLÜSSIGKEIT UND INJEKTION EINES ADDITIVS
Title (fr)
PROCÉDÉ ET DISPOSITIF DE TRAITEMENT PAR FLUIDE SUPER CRITIQUE AVEC INJECTION D'ADDITIF
Publication
Application
Priority
- FR 1454890 A 20140528
- EP 2015061885 W 20150528
Abstract (en)
[origin: WO2015181313A1] A treatment device using a supercritical fluid comprises: (a) a chamber (14) for receiving the parts to be treated, provided with an opening and closing door (15), (b) means (6, 8) for supplying a supercritical fluid to said chamber (14), including first fluid storage means (6) and means (10, 12) for bringing the fluid to the supercritical state, (c) second storage means (30) for storing a second fluid, such as an additive, for example a solvent, (d) means (34, 36, 38) for injecting into the chamber the second fluid stored in the second storage means (30), at an atmospheric pressure or at a pressure substantially close to the atmospheric pressure, or together with the supercritical fluid, after the door is closed and the parts to be cleaned are loaded into the chamber.
IPC 8 full level
B08B 7/00 (2006.01)
CPC (source: EP US)
B08B 3/02 (2013.01 - US); B08B 3/045 (2013.01 - US); B08B 3/08 (2013.01 - US); B08B 7/0021 (2013.01 - EP US); H01L 21/02101 (2013.01 - US); H01L 21/67051 (2013.01 - US); B08B 3/04 (2013.01 - US)
Citation (search report)
See references of WO 2015181313A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2015181313 A1 20151203; CA 2949891 A1 20151203; EP 3148716 A1 20170405; FR 3021554 A1 20151204; US 2017182523 A1 20170629
DOCDB simple family (application)
EP 2015061885 W 20150528; CA 2949891 A 20150528; EP 15726118 A 20150528; FR 1454890 A 20140528; US 201515313162 A 20150528