EP 3160903 A1 20170503 - FLUIDIZED BED REACTOR AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON GRANULES
Title (en)
FLUIDIZED BED REACTOR AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON GRANULES
Title (de)
WIRBELSCHICHTREAKTOR UND VERFAHREN ZUR HERSTELLUNG VON POLYKRISTALLINEM SILICIUMGRANULAT
Title (fr)
RÉACTEUR À LIT FLUIDISÉ ET PROCÉDÉ DE PRODUCTION DE SILICIUM POLYCRISTALLIN GRANULAIRE
Publication
Application
Priority
- DE 102014212049 A 20140624
- EP 2015063860 W 20150619
Abstract (en)
[origin: WO2015197498A1] The invention relates to a fluidized bed reactor for producing polycrystalline silicon granules, comprising a reactor vessel (1), a reactor tube (2), and a reactor bottom (15) within the reactor vessel (1), wherein an intermediate jacket (3) is located between an outer wall of the reactor tube (2) and an inner wall of the reactor vessel (1), and comprising a heating device (5), at least one bottom gas nozzle (9) for feeding fluidizing gas, at least one secondary gas nozzle (10) for feeding reaction gas, a feeding apparatus (11) for feeding silicon nucleus particles, a removal line (14) for polycrystalline silicon granules, and an apparatus for leading away reactor exhaust gas (16), wherein a main body of the reactor tube (2) is composed of 60 wt% silicon carbide and comprises a CVD coating having a layer thickness of at least 5 µm, composed of at least 99.995 wt% SiC, or wherein a main body of the reactor tube (2) is composed of sapphire glass, containing at least 99.99 wt% α-Al2O3. The invention further relates to a method for producing polycrystalline silicon granules in such a fluidized bed reactor.
IPC 8 full level
C01B 33/027 (2006.01); C01B 33/03 (2006.01); C23C 16/442 (2006.01)
CPC (source: CN EP KR US)
B01J 8/1827 (2013.01 - US); B01J 8/1836 (2013.01 - US); B01J 8/1872 (2013.01 - KR US); C01B 33/027 (2013.01 - CN EP US); C01B 33/029 (2013.01 - EP US); C01B 33/03 (2013.01 - CN EP KR US); C23C 16/325 (2013.01 - KR); C23C 16/442 (2013.01 - CN KR); B01J 2208/00761 (2013.01 - US); B01J 2208/00902 (2013.01 - US)
Citation (search report)
See references of WO 2015197498A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102014212049 A1 20151224; CN 106458608 A 20170222; CN 106458608 B 20190503; EP 3160903 A1 20170503; KR 101914535 B1 20181102; KR 20160148601 A 20161226; TW 201600655 A 20160101; TW I555888 B 20161101; US 2017158516 A1 20170608; WO 2015197498 A1 20151230
DOCDB simple family (application)
DE 102014212049 A 20140624; CN 201580024472 A 20150619; EP 15734088 A 20150619; EP 2015063860 W 20150619; KR 20167032246 A 20150619; TW 104119737 A 20150618; US 201515320971 A 20150619