EP 3161317 A1 20170503 - VACUUM PUMP SYSTEM
Title (en)
VACUUM PUMP SYSTEM
Title (de)
VAKUUMPUMPEN-SYSTEM
Title (fr)
SYSTÈME DE POMPES À VIDE
Publication
Application
Priority
- DE 202014005279 U 20140626
- EP 2015063287 W 20150615
Abstract (en)
[origin: WO2015197396A1] A vacuum pump system for evacuating a chamber, in particular a lock chamber or process chamber, comprises a main vacuum pump (12) preferably designed as a screw pump. An inlet (30) of the main vacuum pump (12) is connected to the chamber that is to be evacuated. An auxiliary vacuum pump (24), especially a Roots pump, is disposed in the pumping direction of the main vacuum pump (12). An outlet zone (32) of the main vacuum pump (12) is connected to a main outlet (34) and to an inlet (38) of the auxiliary vacuum pump. Furthermore, an outlet (40) of the auxiliary vacuum pump is connected to the main outlet (34).
IPC 8 full level
F04C 23/00 (2006.01); F04C 18/12 (2006.01); F04C 18/16 (2006.01); F04C 25/02 (2006.01); F04C 28/02 (2006.01); F04C 28/26 (2006.01)
CPC (source: CN EP KR US)
F04C 18/12 (2013.01 - KR); F04C 18/126 (2013.01 - US); F04C 18/16 (2013.01 - EP KR US); F04C 23/005 (2013.01 - CN EP KR US); F04C 25/02 (2013.01 - CN EP KR US); F04C 28/02 (2013.01 - KR); F04C 28/26 (2013.01 - CN EP KR US); F04C 18/12 (2013.01 - CN EP US); F04C 18/16 (2013.01 - CN); F04C 28/02 (2013.01 - CN EP US)
Citation (search report)
See references of WO 2015197396A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 202014005279 U1 20151005; CN 106662106 A 20170510; EP 3161317 A1 20170503; EP 3161317 B1 20201230; JP 2017520715 A 20170727; JP 6615132 B2 20191211; KR 101878088 B1 20180712; KR 20170010410 A 20170131; US 10465686 B2 20191105; US 2017122319 A1 20170504; WO 2015197396 A1 20151230
DOCDB simple family (application)
DE 202014005279 U 20140626; CN 201580031572 A 20150615; EP 15729446 A 20150615; EP 2015063287 W 20150615; JP 2016575561 A 20150615; KR 20167036336 A 20150615; US 201515320169 A 20150615