EP 3161847 A4 20180131 - INTEGRATED MICRO-ELECTROMECHANICAL SWITCHES AND A RELATED METHOD THEREOF
Title (en)
INTEGRATED MICRO-ELECTROMECHANICAL SWITCHES AND A RELATED METHOD THEREOF
Title (de)
INTEGRIERTE MIKROELEKTROMECHANISCHE SCHALTER UND EIN ZUGEHÖRIGES VERFAHREN DAFÜR
Title (fr)
MICRO-COMMUTATEURS ÉLECTROMÉCANIQUES INTÉGRÉS ET PROCÉDÉ ASSOCIÉ
Publication
Application
Priority
- US 201414314344 A 20140625
- US 2015037155 W 20150623
Abstract (en)
[origin: WO2015200307A2] A system includes a plurality of micro-electromechanical switches including a plurality of gates, coupled to each other. Each micro-electromechanical switch includes a beam electrode disposed on a substrate. A beam includes an anchor portion coupled to the beam electrode. The beam includes a first beam portion extending from the anchor portion along a first direction; and a second beam portion extending from the anchor portion along a second direction opposite to the first direction. A first control electrode and a first contact electrode are disposed on the substrate, facing the first beam portion. A second control electrode and a second contact electrode are disposed on the substrate, facing the second beam portion. The first control electrode and the second control electrode are coupled to form a gate among the plurality of gates. The plurality of micro-electromechanical switches is arranged in at least one of a series arrangement, parallel arrangement.
IPC 8 full level
H01H 59/00 (2006.01)
CPC (source: CN EP)
H01H 59/0009 (2013.01 - CN EP); H01H 2001/0084 (2013.01 - CN EP); H01H 2239/004 (2013.01 - EP)
Citation (search report)
- [XI] US 2013134018 A1 20130530 - AIMI MARCO FRANCESCO [US]
- [XI] US 2012249261 A1 20121004 - AIMI MARCO FRANCESCO [US], et al
- See references of WO 2015200307A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2015200307 A2 20151230; WO 2015200307 A3 20160225; CA 2952661 A1 20151230; CA 2952661 C 20230117; CN 106415772 A 20170215; CN 106415772 B 20190813; EP 3161847 A2 20170503; EP 3161847 A4 20180131; EP 3161847 B1 20230531; JP 2017527949 A 20170921; JP 6781048 B2 20201104; SG 11201610176Y A 20170127
DOCDB simple family (application)
US 2015037155 W 20150623; CA 2952661 A 20150623; CN 201580034300 A 20150623; EP 15810992 A 20150623; JP 2016574280 A 20150623; SG 11201610176Y A 20150623