Global Patent Index - EP 3163276 A3

EP 3163276 A3 20170906 - FABRY-PEROT OPTICAL SENSOR

Title (en)

FABRY-PEROT OPTICAL SENSOR

Title (de)

OPTISCHER FABRY-PEROT-SENSOR

Title (fr)

CAPTEUR OPTIQUE FABRY-PÉROT

Publication

EP 3163276 A3 20170906 (EN)

Application

EP 16196731 A 20161101

Priority

EP 15192656 A 20151102

Abstract (en)

[origin: EP3163340A1] In the present invention, methods to manufacture and devices are disclosed for implementing Fabry-Perot optical waveguide sensors in different configurations. The configurations comprise a deformable membrane (30) fixed to an optical cavity (20) that is adapted to an optical waveguide. The optical cavity comprises at least a longitudinally traversing hollow core connected to the entry and the exit of the optical cavity and comprises a volume of air (50) situated to the side of the entry and a volume of liquid (40) situated to the side of the deformable membrane. The volume of liquid is in contact with the deformable membrane and with the exit of the optical cavity and the volume of air is in fluidic connection, by the volume of liquid, with said deformable membrane.

IPC 8 full level

G01L 9/00 (2006.01); G01D 5/28 (2006.01); G02B 6/26 (2006.01)

CPC (source: EP)

G01D 5/268 (2013.01); G01D 5/35312 (2013.01); G02B 6/29359 (2013.01)

Citation (search report)

  • [X] US 5311485 A 19940510 - KUZMENKO PAUL J [US], et al
  • [X] WO 2007019676 A1 20070222 - FISO TECHNOLOGIES INC [CA], et al
  • [XY] CN 2526798 Y 20021218 - XIAN INST OF OPTICS AND FINE M [CN]
  • [XY] US 2006227330 A1 20061012 - HJELME DAG R [NO], et al
  • [X] EOM ETAL.: "Fiber optic Fabry-Perot pressure sensor based on lensed fiber and polymeric diaphragm", SENSORS AND ACTUATORS A: PHYSICAL, vol. 225, 31 January 2015 (2015-01-31), pages 25 - 32, XP002768214
  • [X] LIMA S E U ET AL: "Fiber fabry-perot sensors for acoustic detection of partial discharges in transformers", MICROWAVE AND OPTOELECTRONICS CONFERENCE (IMOC), 2009 SBMO/IEEE MTT-S INTERNATIONAL, IEEE, PISCATAWAY, NJ, USA, 3 November 2009 (2009-11-03), pages 307 - 311, XP031646755, ISBN: 978-1-4244-5356-6
  • [X] LIMA ET AL.: "INTRINSIC AND EXTRINSIC FIBER FABRY-PEROT SENSORS FOR ACCOUSTIC DETECTIION IN LIQUIDS", MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, vol. 52, no. 5, 5 May 2010 (2010-05-05), pages 1129 - 1134, XP002768215
  • [Y] SANG ET AL.: "Surface stress-based biosensors", BIOSENSORS AND BIOELECTRONICS, vol. 51, 2014, pages 124 - 135, XP002772641
  • [Y] TAKAHASHI ET AL.: "Capacitive Tactile Sensor Based on Dielectric Oil Displacement out of a Parylene Dome into Surrounding Channels", MICROMACHINES, vol. 3, 2012, pages 270 - 278, XP002772642

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

EP 3163340 A1 20170503; EP 3163340 B1 20231011; EP 3163276 A2 20170503; EP 3163276 A3 20170906

DOCDB simple family (application)

EP 15192656 A 20151102; EP 16196731 A 20161101