EP 3166734 A1 20170517 - PIEZOELECTRIC ULTRASONIC TRANSDUCER AND PROCESS
Title (en)
PIEZOELECTRIC ULTRASONIC TRANSDUCER AND PROCESS
Title (de)
PIEZOELEKTRISCHER ULTRASCHALLWANDLER UND VERFAHREN
Title (fr)
TRANSDUCTEUR ULTRASONORE PIÉZOÉLECTRIQUE ET SON PROCÉDÉ
Publication
Application
Priority
- US 201462022140 P 20140708
- US 201414569256 A 20141212
- US 2015034729 W 20150608
Abstract (en)
[origin: WO2016007250A1] A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a multilayer stack disposed on a substrate. The multilayer stack may include an anchor structure disposed over the substrate, a piezoelectric layer stack disposed over the anchor structure, and a mechanical layer disposed proximate to the piezoelectric layer stack. The piezoelectric layer stack may be disposed over a cavity. The mechanical layer may seal the cavity and, together with the piezoelectric layer stack, is supported by the anchor structure and forms a membrane over the cavity, the membrane being configured to undergo one or both of flexural motion and vibration when the PMUT receives or transmits ultrasonic signals.
IPC 8 full level
B06B 1/06 (2006.01); G06F 3/043 (2006.01); H01L 41/09 (2006.01)
CPC (source: CN EP KR)
B06B 1/0622 (2013.01 - KR); B06B 1/0648 (2013.01 - KR); B06B 1/0651 (2013.01 - KR); B06B 1/0666 (2013.01 - CN EP KR); B06B 1/067 (2013.01 - KR); B06B 1/0674 (2013.01 - KR); B06B 1/0677 (2013.01 - KR); G06F 3/043 (2013.01 - CN EP KR); G06V 40/1306 (2022.01 - KR); H10N 30/01 (2023.02 - EP); H10N 30/2047 (2023.02 - EP KR); B06B 1/0622 (2013.01 - EP); B06B 1/0648 (2013.01 - EP); B06B 1/0651 (2013.01 - EP); B06B 1/067 (2013.01 - EP); B06B 1/0674 (2013.01 - EP); B06B 1/0677 (2013.01 - EP); G06V 40/1306 (2022.01 - EP)
Citation (search report)
See references of WO 2016007250A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2016007250 A1 20160114; BR 112017000134 A2 20171107; CA 2950919 A1 20160114; CN 106660074 A 20170510; CN 106660074 B 20190924; EP 3166734 A1 20170517; JP 2017528940 A 20170928; JP 6599968 B2 20191030; KR 20170029497 A 20170315
DOCDB simple family (application)
US 2015034729 W 20150608; BR 112017000134 A 20150608; CA 2950919 A 20150608; CN 201580035279 A 20150608; EP 15731441 A 20150608; JP 2017500036 A 20150608; KR 20177000538 A 20150608