EP 3169998 A1 20170524 - PRECONCENTRATOR FOR ADSORBING/DESORBING AT LEAST ONE COMPONENT OF A GAS
Title (en)
PRECONCENTRATOR FOR ADSORBING/DESORBING AT LEAST ONE COMPONENT OF A GAS
Title (de)
PREKONZENTRATOR ZUM ADSORBIEREN UND/ODER DESORBIEREN WENIGSTENS EINER KOMPONENTE EINES GASES
Title (fr)
PRÉ-CONCENTRATEUR POUR L'ADSORPTION ET/OU DÉSORPTION D'AU MOINS UN COMPOSANT D'UN GAZ
Publication
Application
Priority
- DE 102014213874 A 20140716
- EP 2015063293 W 20150615
Abstract (en)
[origin: WO2016008660A1] The invention pertains to a microstructure (12) for adsorbing/desorbing at least one gas component of a gas supplied to the microstucture (12), the microstructure (12) comprising a semiconductor substrate (14) with a bottom (16) and a top (18), wherein a plurality of microchannels (20), which extend from the bottom (16) to the top (18) of the semiconductor substrate (14), are provided. A top surface (22) of each of the microchannels (20) is configured to adsorb and/or desorb the at least one gas component when the gas is passed through the microchannels.
IPC 8 full level
B01J 20/28 (2006.01); G01N 33/00 (2006.01)
CPC (source: CN EP KR US)
B01J 15/00 (2013.01 - US); B01J 20/28033 (2013.01 - EP US); B01J 20/28095 (2013.01 - EP US); G01N 33/0011 (2013.01 - CN EP KR US); G01N 2033/0019 (2013.01 - CN EP KR US)
Citation (search report)
See references of WO 2016008660A1
Citation (examination)
US 2010236341 A1 20100923 - MARTIN MICHAEL [US], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102014213874 A1 20160121; CN 106662560 A 20170510; EP 3169998 A1 20170524; KR 20170035960 A 20170331; US 2017189882 A1 20170706; WO 2016008660 A1 20160121
DOCDB simple family (application)
DE 102014213874 A 20140716; CN 201580038587 A 20150615; EP 15730735 A 20150615; EP 2015063293 W 20150615; KR 20177004238 A 20150615; US 201515325178 A 20150615