EP 3187304 B1 20221221 - METHOD AND SYSTEM FOR CONVERGENT POLISHING
Title (en)
METHOD AND SYSTEM FOR CONVERGENT POLISHING
Title (de)
VERFAHREN UND SYSTEM FÜR DURCHGEHENDES POLIEREN
Title (fr)
PROCÉDÉ ET SYSTÈME DE POLISSAGE CONVERGENT
Publication
Application
Priority
- US 201161454893 P 20110321
- EP 12760262 A 20120320
- US 2012029837 W 20120320
Abstract (en)
[origin: WO2012129244A1] A polishing system for polishing an optical element includes a polishing pad having a radial dimension and a septum disposed on the polishing pad. The septum is configured to partially surround the optical element. The optical element contacts the polishing pad over a range of the radial dimension and a pad wear rate of the polishing pad is substantially constant as a function of radial dimension over the range of the radial dimension.
IPC 8 full level
B24B 37/04 (2012.01); B24B 13/005 (2006.01); B24B 37/10 (2012.01); B24B 37/34 (2012.01); B24B 57/02 (2006.01)
CPC (source: CN EP KR RU)
B24B 7/04 (2013.01 - KR); B24B 7/20 (2013.01 - KR); B24B 13/00 (2013.01 - KR); B24B 13/005 (2013.01 - EP); B24B 37/044 (2013.01 - CN EP); B24B 37/102 (2013.01 - CN EP); B24B 37/34 (2013.01 - CN EP); B24B 41/067 (2013.01 - CN); B24B 57/02 (2013.01 - CN EP); B24B 7/04 (2013.01 - RU)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012129244 A1 20120927; CN 103534062 A 20140122; EP 2688712 A1 20140129; EP 2688712 A4 20150715; EP 2688712 B1 20170104; EP 3187304 A1 20170705; EP 3187304 B1 20221221; JP 2014511769 A 20140519; JP 2016190318 A 20161110; JP 5968418 B2 20160810; JP 6232172 B2 20171115; KR 20140019392 A 20140214; RU 2013146696 A 20150427; RU 2610991 C2 20170217
DOCDB simple family (application)
US 2012029837 W 20120320; CN 201280014310 A 20120320; EP 12760262 A 20120320; EP 16207175 A 20120320; JP 2014501190 A 20120320; JP 2016133727 A 20160705; KR 20137027590 A 20120320; RU 2013146696 A 20120320