EP 3198148 B1 20200226 - VACUUM-GENERATING PUMPING SYSTEM AND PUMPING METHOD USING THIS PUMPING SYSTEM
Title (en)
VACUUM-GENERATING PUMPING SYSTEM AND PUMPING METHOD USING THIS PUMPING SYSTEM
Title (de)
VAKUUMERZEUGENDES PUMPSYSTEM UND PUMPVERFAHREN MIT DIESEM PUMPSYSTEM
Title (fr)
SYSTÈME DE POMPAGE POUR GÉNÉRER UN VIDE ET PROCÉDÉ DE POMPAGE AU MOYEN DE CE SYSTÈME DE POMPAGE
Publication
Application
Priority
EP 2014070691 W 20140926
Abstract (en)
[origin: WO2016045753A1] Vacuum-generating pumping system (SP) comprising a main vacuum pump which is a dry screw pump (3) having a gas inlet intake (2) connected to a vacuum chamber (1) and a gas delivery outlet (4) opening into a pipe (5) discharging the gases to a gas exhaust outlet (8) from the pumping system. The pumping system comprises a nonreturn valve (6) positioned between the gas delivery outlet (4) and the gas exhaust outlet (8), and an auxiliary vacuum pump (7) connected in parallel with the nonreturn valve. The main vacuum pump (3) is switched on to pump the gases contained in the vacuum chamber (1) and deliver these gases via its gas delivery outlet (4), at the same time as the switching-on of the auxiliary vacuum pump (7). Furthermore, the auxiliary vacuum pump (7) continues to pump all the time that the main vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the time that the main vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).
IPC 8 full level
F04C 25/02 (2006.01); F04C 18/16 (2006.01); F04C 28/02 (2006.01)
CPC (source: EP KR RU US)
F04C 2/16 (2013.01 - US); F04C 11/003 (2013.01 - US); F04C 15/06 (2013.01 - US); F04C 18/16 (2013.01 - EP KR RU US); F04C 23/001 (2013.01 - EP KR US); F04C 23/005 (2013.01 - EP KR US); F04C 25/02 (2013.01 - EP KR RU US); F04C 28/02 (2013.01 - EP KR RU US); F04C 28/06 (2013.01 - KR); F04C 28/06 (2013.01 - EP US); F04C 2220/12 (2013.01 - EP KR US)
Citation (examination)
EP 0401741 A1 19901212 - CIT ALCATEL [FR]
Citation (opposition)
Opponent : Edwards Limited,
- JP 2003139055 A 20030514 - ULVAC CORP
- JP 2003129957 A 20030508 - ULVAC CORP
- JP 2003155988 A 20030530 - ULVAC CORP
- US 2004173312 A1 20040909 - SHIBAYAMA KOUJI [JP], et al
- US 2003068233 A1 20030410 - ROYCE DOUGLAS [US], et al
- JP 2003139055 A 20030514 - ULVAC CORP
- JP 2003129957 A 20030508 - ULVAC CORP
- JP 2003155988 A 20030530 - ULVAC CORP
- US 2004173312 A1 20040909 - SHIBAYAMA KOUJI [JP], et al
- US 2003068233 A1 20030410 - ROYCE DOUGLAS [US], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2016045753 A1 20160331; AU 2014406724 A1 20170413; AU 2014406724 B2 20190919; BR 112017005927 A2 20171219; BR 112017005927 B1 20220712; CA 2961977 A1 20160331; CN 107002680 A 20170801; DK 3198148 T3 20200406; EP 3198148 A1 20170802; EP 3198148 B1 20200226; ES 2780873 T3 20200827; JP 2017531125 A 20171019; KR 20170063839 A 20170608; KR 20210102478 A 20210819; PL 3198148 T3 20200810; PT 3198148 T 20200402; RU 2670640 C1 20181024; RU 2670640 C9 20181204; TW 201623801 A 20160701; TW I725943 B 20210501; US 2017298935 A1 20171019
DOCDB simple family (application)
EP 2014070691 W 20140926; AU 2014406724 A 20140926; BR 112017005927 A 20140926; CA 2961977 A 20140926; CN 201480082186 A 20140926; DK 14777077 T 20140926; EP 14777077 A 20140926; ES 14777077 T 20140926; JP 2017516050 A 20140926; KR 20177011372 A 20140926; KR 20217025124 A 20140926; PL 14777077 T 20140926; PT 14777077 T 20140926; RU 2017114347 A 20140926; TW 104131132 A 20150921; US 201415512883 A 20140926